(Ieee, 2022) Pala, Sedat; N/A; N/A; N/A; Department of Mechanical Engineering; Toymus, Alp Timuçin; Bathaei, Mohammad Javad; Akıncı, Seçkin; Beker, Levent; PhD Student; PhD Student; Master Student; Faculty Member; Department of Mechanical Engineering; N/A; N/A; n2STAR-Koç University Nanofabrication and Nanocharacterization Center for Scientifc and Technological Advanced Research; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; N/A; N/A; 308798
Although piezoelectric micromachined ultrasonic transducers (pMUTs) are of great interest for various applications, the current fabrication complexity and acoustic performance of such devices could limit their performance. Especially for applications involving low voltage electronics, improving the bandwidths of piezoelectric micromachined ultrasonic transducers is an important step. Here, we present a novel pMUT design with an acoustic cavity and its simple fabrication strategy. Our approach not only improves the bandwidth compared to conventional pMUTs but also eliminates complex fabrication steps.
