Publication: Design and fabrication of thermo-mechanical thermal detector arrays with optical readout
Files
Program
Electrical and Computer Engineering
KU-Authors
KU Authors
Co-Authors
Authors
Torun, Hamdi
Advisor
Ürey, Hakan
Publication Date
2005
Language
English
Type
Thesis
Journal Title
Journal ISSN
Volume Title
Abstract
Description
xvii, 112 l. : ill. 30 cm.
Source:
Publisher:
Koç University
Keywords:
Subject
Optical detectors, Diffraction gratings, Interferometers, Microelectromechanical systems, Microfabrication