<link rel="stylesheet" href="styles.f3b1fba60ec7970c.css">

Publication:
Mix-and-match fabrication of junctionless silicon nanosheet field effect transistor based on field-emission scanning probe lithography

Simple item page
dc.contributor.advisorAlaca, Burhanettin Erdem
dc.contributor.kuauthorAltınmakas, Taner
dc.contributor.programMaterials Science and Engineering
dc.contributor.refereeYalçınkaya, Arda D.
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.coverage.spatialİstanbul
dc.date.accessioned2026-09-10T10:13:14Z
dc.date.issued2025
dc.description.fulltextYes
dc.format.extentxiii, 39 leaves :; illustrations ;; 30 cm.
dc.identifier.embargoNo
dc.identifier.endpage52
dc.identifier.filenameinventorynoT_2025_129_GSSE
dc.identifier.urihttps://hdl.handle.net/20.500.14288/35237
dc.identifier.yoktezid983066
dc.identifier.yoktezlinkhttps://tez.yok.gov.tr/UlusalTezMerkezi/TezGoster?key=CtwiQkYvArAb95Ufpfs_vhXBxOEoOxUZ01qdfljHvjGtYsWSNPxMZlfGCJ7RDsFG
dc.keywordsJunctionless transistor, Silicon nanosheet FET, Field-emission scanning probe lithography, ,Nanoelectronics fabrication, Semiconductor nanofabrication
dc.keywordsAnahtar kelimeler: Junctionless transistör, Silikon nanosheet FET, Tarama probu litografisi, Nanoelektronik üretim, Yarıiletken imalat.;
dc.languageeng
dc.publisherKoç University
dc.relation.collectionKoç University Theses & Dissertations Collection
dc.rightsrestrictedAccess
dc.rights.copyrightsnote© All Rights Reserved. Accessible to Koç University Affiliated Users Only!
dc.subjectNanowires
dc.subjectMicroelectromechanical systems
dc.subjectNanostructured materials
dc.titleMix-and-match fabrication of junctionless silicon nanosheet field effect transistor based on field-emission scanning probe lithography
dc.title.alternativeAlan salınımlı taramalı uç litografisine dayalı eklemsiz silisyum nano-levha alan etkili transistörün karıştır-eşleştir yöntemiyle üretimi
dc.typeThesis
dspace.entity.typePublication
relation.isAdvisorOfThesise6cb6850-fab7-4d8f-9256-378526b43c99
relation.isAdvisorOfThesis.latestForDiscoverye6cb6850-fab7-4d8f-9256-378526b43c99
relation.isParentOrgUnitOfPublication434c9663-2b11-4e66-9399-c863e2ebae43
relation.isParentOrgUnitOfPublication.latestForDiscovery434c9663-2b11-4e66-9399-c863e2ebae43

Files

Collections

Theses & Dissertations