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Electrostatic and piezoelectric MEMS scanner development for laser displays

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dc.contributor.advisorÜrey, Hakan
dc.contributor.advisorid0000-0002-2031-7967
dc.contributor.authorBaran, Utku
dc.contributor.instituteKoç University Graduate School of Sciences and Engineering
dc.contributor.programElectrical Engineering
dc.contributor.yokid8579
dc.date.accessioned2024-11-09T22:39:55Z
dc.date.issued2012
dc.descriptionxv, 73 l : ill ; 30 cm.
dc.identifier.urihttps://hdl.handle.net/20.500.14288/5925
dc.keywordsRotary stage
dc.keywordsMEMS scanner
dc.keywordsComb-actuator
dc.keywordsPZT thin film actuator
dc.keywordsFinite-element-modeling
dc.keywordsLaser display
dc.languageEnglish
dc.publisherKoç University
dc.relation.collectionKU Theses and Dissertations
dc.rightsrestrictedAccess
dc.rights.copyrightsnote© All Rights Reserved. Accessible to Koç University Affiliated Users Only!
dc.subjectMicroelectromechanical systems, Design and construction
dc.subjectOptical scanners
dc.thesis.degreeMaster's Degree
dc.thesis.grantorİstanbul
dc.titleElectrostatic and piezoelectric MEMS scanner development for laser displays
dc.typeThesis
dspace.entity.typePublication
relation.isAdvisorOfThesis99202acc-f1df-4e28-89ea-da7d4b8ebae3
relation.isAdvisorOfThesis.latestForDiscovery99202acc-f1df-4e28-89ea-da7d4b8ebae3

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