Publication: MEMS compatible highly doped piezoresistive silicon nanowires : fabrication and electromechanical characterization
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Program
Mechanical Engineering
KU-Authors
KU Authors
Co-Authors
Authors
Nadar, Gökhan
Advisor
Alaca, Burhanettin Erdem
Publication Date
Language
English
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Journal Title
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Volume Title
Abstract
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Publisher:
Koç University
Keywords:
Subject
Nanowires, Silicon, Transistors, Detectors, Nanostructured materials, Nanoelectromechanical systems, Nanoelectronics, Microelectronics, Microelectromechanical systems, Nanotechnology