Publication:
Development of resonance tracking and optical readout methods for MEMS sensor arrays

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Program

Electrical and Electronics Engineering

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Authors

Mustafazade, Arif

Advisor

Ürey, Hakan

Publication Date

2016

Language

English

Type

Dissertation

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Abstract

Description

xxii, 200 leaves : illustrations ; 30 cm.

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Publisher:

Koç University

Keywords:

Subject

Optical detectors, Optical fiber detectors, Optical MEMS, Optoelectronic devices, Design and construction, Integrated optics, Microelectromechanical systems

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