Publication: Nanowire electromechanical switch as a tool for surface characterization
Files
Program
Mechanical Engineering
KU-Authors
KU Authors
Co-Authors
Authors
Roudposhti, Sepeedeh Shahbeigi
Advisor
Alaca, Burhanettin Erdem
Publication Date
2019
Language
English
Type
Thesis
Journal Title
Journal ISSN
Volume Title
Abstract
Description
59 leaves : illustrations ; 30 cm.
Source:
Publisher:
Koç University
Keywords:
Subject
Microelectromechanical systems, Electromechanical devices, Microtechnology, Nanowires, Mikroelektromekanik sistemler, Polisilisyum, Polysilicon