Publication:
Dynamic characterization and damping control of a MEMS structure - art. no. 671509

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dc.contributor.departmentDepartment of Mechanical Engineering
dc.contributor.kuauthorAlaca, Ilgım Veryeri
dc.contributor.kuauthorBaşdoğan, İpek
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T13:49:57Z
dc.date.issued2007
dc.description.fulltextYES
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipN/A
dc.description.versionPublisher version
dc.identifier.doi10.1117/12.754368
dc.identifier.eissn1996-756X
dc.identifier.embargoNO
dc.identifier.filenameinventorynoIR00706
dc.identifier.isbn978-0-8194-6863-5
dc.identifier.issn0277-786X
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-42149105126
dc.identifier.urihttps://doi.org/10.1117/12.754368
dc.identifier.wos250810400008
dc.keywordsMEMS design
dc.keywordsQuality factor
dc.keywordsEffective damping
dc.keywordsDynamic characterization
dc.language.isoeng
dc.publisherSociety of Photo-optical Instrumentation Engineers (SPIE)
dc.relation.ispartofProceedings of SPIE
dc.relation.urihttp://cdm21054.contentdm.oclc.org/cdm/ref/collection/IR/id/709
dc.subjectMechanical engineering
dc.subjectOptics
dc.titleDynamic characterization and damping control of a MEMS structure - art. no. 671509
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorAlaca, Ilgım Veryeri
local.contributor.kuauthorBaşdoğan, İpek
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Mechanical Engineering
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relation.isOrgUnitOfPublication.latestForDiscoveryba2836f3-206d-4724-918c-f598f0086a36
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
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