Publication: Model validation and performance analyses for MEMS design
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Program
Mechanical Engineering
KU-Authors
KU Authors
Co-Authors
Authors
Anaç, Ozan
Advisor
Başdoğan, İpek
Publication Date
2006
Language
English
Type
Thesis
Journal Title
Journal ISSN
Volume Title
Abstract
Description
xii, 72 l. : ill. 30 cm.
Source:
Publisher:
Koç University
Keywords:
Subject
Microelectromechanical systems, Electromechanical devices, Microtechnology, BioMEMS