Publication:
Characterization of stress gradients in electroplated nickel thin films

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Program

Mechanical Engineering

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Authors

Kılınç, Yasin

Advisor

Alaca, Burhanettin Erdem

Publication Date

2012

Language

English

Type

Thesis

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Abstract

Description

xi, 111 l : ill ; 30 cm.

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Publisher:

Koç University

Keywords:

Subject

Thin films, Microelectromechanical systems

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