Publication: Mems platform for ex-situ micromechanical testing of silicon carbide nanowires
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Program
Organization Authors
Co-Authors
Mead, J. L.
Pakzad, S. Z.
Ma, L.
Wang, S.
Fatikow, S.
Date
Language
eng
Embargo Status
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
Source
Publisher
IEEE
Subject
Citation
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Source
2026 International Conference on Manipulation, Automation and Robotics at Small Scales (Marss)
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DOI
10.1109/marss70227.2026.11655711