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Sensitivity analysis and performance prediction methodology for MEMS design

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dc.contributor.advisorBaşdoğan, İpek
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorMeral, Faik Can
dc.contributor.programMechanical Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.coverage.spatialİstanbul
dc.date.accessioned2024-11-09T21:58:24Z
dc.date.issued2005
dc.format.extentxi, 61 l. : ill. 30 cm.
dc.identifier.urihttps://hdl.handle.net/20.500.14288/4545
dc.language.isoeng
dc.publisherKoç University
dc.relation.collectionKU Theses and Dissertations
dc.rightsrestrictedAccess
dc.rights.copyrightsnote© All Rights Reserved. Accessible to Koç University Affiliated Users Only!
dc.subjectMicroelectromechanical systems
dc.titleSensitivity analysis and performance prediction methodology for MEMS design
dc.typeThesis
dspace.entity.typePublication
local.contributor.kuauthorMeral, Faik Can
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