Publication:
A MEMS based visible-NIR Fourier transform microspectrometer - art. no. 61860C

dc.contributor.coauthorWolter, A.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorAtaman, Çağlar
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuauthorIşıkman, Serhan Ömer
dc.contributor.kuprofilePhD Student
dc.contributor.kuprofileFaculty Member
dc.contributor.yokidN/A
dc.contributor.yokid8579
dc.contributor.yokidN/A
dc.date.accessioned2024-11-09T12:11:14Z
dc.date.issued2006
dc.description.abstractDesign, fabrication and characterization of a novel out-of-plane vertical comb-drive actuator based Fourier transform microspectrometer (FTS) is presented. The spectrometer utilizes resonant mode vertical comb actuators as a variable-depth diffraction grating and a single photodetector to monitor the 0th order of the diffraction pattern. The spectrum of the source illuminating the gratings is computed by Fourier transforming the 0th order intensity as a function of the optical path difference. The vertical comb actuators have a travel range of 100 mu m under atmospheric pressure with 28V excitation, which yields a theoretical spectral resolution of 0.5nm in the visible and better than 5nm in the telecom wavelengths.
dc.description.fulltextYES
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipN/A
dc.description.versionPublisher version
dc.formatpdf
dc.identifier.doi10.1117/12.664781
dc.identifier.embargoNO
dc.identifier.filenameinventorynoIR00525
dc.identifier.isbn0-8194-6242-X
dc.identifier.issn0277-786X
dc.identifier.linkhttps://doi.org/10.1117/12.664781
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-33746663604
dc.identifier.urihttps://hdl.handle.net/20.500.14288/1028
dc.identifier.wos238881100017
dc.keywordsImaging science and photographic technology
dc.keywordsComb actuation
dc.keywordsFourier transform spectroscopy
dc.keywordsMEMS
dc.keywordsDiffraction grating
dc.languageEnglish
dc.publisherSociety of Photo-optical Instrumentation Engineers (SPIE)
dc.relation.urihttp://cdm21054.contentdm.oclc.org/cdm/ref/collection/IR/id/590
dc.sourceProceedings of SPIE
dc.subjectOptics
dc.subjectInstruments and instrumentation
dc.titleA MEMS based visible-NIR Fourier transform microspectrometer - art. no. 61860C
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authoridN/A
local.contributor.authorid0000-0002-2031-7967
local.contributor.authoridN/A
local.contributor.kuauthorAtaman, Çağlar
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorIşıkman, Serhan Ömer
local.publication.orgunit1Graduate School of Sciences and Engineering
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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