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Permanent URI for this collectionhttps://hdl.handle.net/20.500.14288/6
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Publication Open Access Top-down technique for scaling to nano in silicon MEMS(American Vacuum Society (AVS), 2017) Wollschlaeger, Nicole; Oesterle, Werner; Leblebici, Yusuf; Department of Mechanical Engineering; Alaca, Burhanettin Erdem; Nadar, Gökhan; Yılmaz, Mustafa Akın; Kılınç, Yasin; Taşdemir, Zuhal; Faculty Member; PhD Student; PhD Student; Department of Mechanical Engineering; Koç University Surface Science and Technology Center (KUYTAM) / Koç Üniversitesi Yüzey Teknolojileri Araştırmaları Merkezi (KUYTAM); Graduate School of Sciences and Engineering; 115108; N/A; N/A; N/A; N/ANanoscale building blocks impart added functionalities to microelectromechanical systems (MEMS). The integration of silicon nanowires with MEMS-based sensors leading to miniaturization with improved sensitivity and higher noise immunity is one example highlighting the advantages of this multiscale approach. The accelerated pace of research in this area gives rise to an urgent need for batch-compatible solutions for scaling to nano. To address this challenge, a monolithic fabrication approach of silicon nanowires with 10-mu m-thick silicon-on-insulator (SOI) MEMS is developed in this work. A two-step Si etching approach is adopted, where the first step creates a shallow surface protrusion and the second step releases it in the form of a nanowire. It is during this second deep etching step that MEMS-with at least a 2-order-of-magnitude scale difference-is formed as well. The technique provides a pathway for preserving the lithographic resolution and transforming it into a very high mechanical precision in the assembly of micro-and nanoscales with an extreme topography. Validation of the success of integration is carried out via in situ actuation of MEMS inside an electron microscope loading the nanowire up to its fracture. The technique yields nanowires on the top surface of MEMS, thereby providing ease of access for the purposes of carrying out surface processes such as doping and contact formation as well as in situ observation. As the first study demonstrating such monolithic integration in thick SOI, the work presents a pathway for scaling down to nano for future MEMS combining multiple scales.Publication Open Access Adaptive Q control for tapping-mode nanoscanning using a piezoactuated bimorph probe(American Institute of Physics (AIP) Publishing, 2007) Department of Mechanical Engineering; Günev, İhsan; Varol, Aydın; Karaman, Sertaç; Başdoğan, Çağatay; Master Student; Faculty Member; Department of Mechanical Engineering; College of Engineering; N/A; N/A; N/A; 125489A new approach, called adaptive Q control, for tapping-mode atomic force microscopy (AFM) is introduced and implemented on a homemade AFM setup utilizing a laser Doppler vibrometer and a piezoactuated bimorph probe. In standard Q control, the effective Q factor of the scanning probe is adjusted prior to the scanning depending on the application. However, there is a trade-off in setting the effective Q factor of an AFM probe. The Q factor is either increased to reduce the tapping forces or decreased to increase the maximum achievable scan speed. Realizing these two benefits simultaneously using standard Q control is not possible. In adaptive Q control, the Q factor of the probe is set to an initial value as in standard Q control, but then modified on the fly during scanning when necessary to achieve this goal. In this article, we present the basic theory behind adaptive Q control, the electronics enabling the online modification of the probe's effective Q factor, and the results of the experiments comparing three different methods: scanning (a) without Q control, (b) with standard Q control, and (c) with adaptive Q control. The results show that the performance of adaptive Q control is superior to the other two methods.Publication Open Access A new consistent hybrid algorithm for solution of the PDF equations of turbulent reactive flow(American Institute of Physics (AIP) Publishing, 2013) Department of Mechanical Engineering; Sheikhsarmast, Reza Mokhtarpoor; Inmas, Shabrina Virta; Muradoğlu, Metin; Faculty Member; Department of Mechanical Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; N/A; 46561This paper presents a newly developed consistent hybrid finite-volume (FV)/particle algorithm for solution of joint PDF (JPDF) model equation of turbulent reacting flows. In this approach, the open source FV package of OpenFOAM is employed to solve the Favre-averaged mean mass and momentum equations using pressure-based PISO algorithm while a particle-based Monte Carlo algorithm is used to solve the fluctuating velocity-turbulence frequency-compositions JPDF transport equation. In the earlier hybrid method [2, 3], a density-based FV algorithm was used to solve the mean flow equations but it has been found to be too dissipative and yet not very robust for incompressible or nearly incompressible flows mainly due to stiffness of the compressible flow equations in the low Mach number limit. In the this work, the density-based FV algorithm is first replaced with a pressure-based PISO algorithm to tackle this problem and then applied for simulation of the Sydney swirl stabilized bluff-body flame SM1. All the equations solved by the FV and particle algorithms are directly derived from the modeled JPDF transport equation so the present method is completely consistent at the level of governing equations. The position and velocity correction algorithms [3] are used to enforce full constancy at the numerical solution level. The results are found to be in a good agreement with the available experimental data and the recent computational results of De Meester et al. [1].Publication Open Access State feedback control for adjusting the dynamic behavior of a piezoactuated bimorph atomic force microscopy probe(American Institute of Physics (AIP) Publishing, 2009) Güvenç, Levent; Department of Mechanical Engineering; Örün, Bilal; Necipoğlu, Serkan; Başdoğan, Çağatay; Master Student; Faculty Member; Department of Mechanical Engineering; College of Engineering; N/A; N/A; 125489We adjust the transient dynamics of a piezoactuated bimorph atomic force microscopy (AFM) probe using a state feedback controller. This approach enables us to adjust the quality factor and the resonance frequency of the probe simultaneously. First, we first investigate the effect of feedback gains on dynamic response of the probe and then show that the time constant of the probe can be reduced by reducing its quality factor and/or increasing its resonance frequency to reduce the scan error in tapping mode AFM.Publication Open Access Guided self-assembly of metallic nanowires and channels(American Institute of Physics (AIP) Publishing, 2004) Şehitoğlu, Hüseyin; Saif, Taher; Department of Mechanical Engineering; Alaca, Burhanettin Erdem; Faculty Member; Department of Mechanical Engineering; College of Engineering; 115108A method is presented to form metallic nanowires and nanochannels by guided self-assembly. The method relies on an initial plasma-enhanced chemical vapor deposition of a silicon oxide film with altered chemistry on a silicon wafer, and the cracking of the film due to tensile stresses upon annealing. The fabricated stress concentration features on the Si substrate control the number of cracks and their orientation. These cracks are then filled with electroless nickel, and the subsequent removal of SiO2 produces a controlled network of nanowires of about 100 nm in dimension. In addition to nanowires, nanobridges, and nanocantilevers have also been fabricated by releasing the wires, confirming that the resulting structures are rather robust. (C) 2004 American Institute of Physics.Publication Open Access Time-resolved local strain tracking microscopy for cell mechanics(American Institute of Physics (AIP) Publishing, 2016) Aydın, O.; Aksoy, B.; Akalın, O. B.; Department of Chemistry; Department of Mechanical Engineering; Bayraktar, Halil; Alaca, Burhanettin Erdem; Faculty Member; Department of Chemistry; Department of Mechanical Engineering; College of Sciences; College of EngineeringA uniaxial cell stretching technique to measure time-resolved local substrate strain while simultaneously imaging adherent cells is presented. The experimental setup comprises a uniaxial stretcher platform compatible with inverted microscopy and transparent elastomer samples with embedded fluorescent beads. This integration enables the acquisition of real-time spatiotemporal data, which is then processed using a single-particle tracking algorithm to track the positions of fluorescent beads for the subsequent computation of local strain. The present local strain tracking method is demonstrated using polydimethylsiloxane (PDMS) samples of rectangular and dogbone geometries. The comparison of experimental results and finite element simulations for the two sample geometries illustrates the capability of the present system to accurately quantify local deformation even when the strain distribution is non-uniform over the sample. For a regular dogbone sample, the experimentally obtained value of local strain at the center of the sample is 77%, while the average strain calculated using the applied cross-head displacement is 48%. This observation indicates that considerable errors may arise when cross-head measurement is utilized to estimate strain in the case of non-uniform sample geometry. Finally, the compatibility of the proposed platform with biological samples is tested using a unibody PDMS sample with a well to contain cells and culture media. HeLa S3 cells are plated on collagen-coated samples and cell adhesion and proliferation are observed. Samples with adherent cells are then stretched to demonstrate simultaneous cell imaging and tracking of embedded fluorescent beads.Publication Open Access Glioma-on-a-chip models(Multidisciplinary Digital Publishing Institute (MDPI), 2021) İlçi, İrem Sultan; Department of Mechanical Engineering; N/A; N/A; Önder, Tuğba Bağcı; Taşoğlu, Savaş; Üstün, Merve; Dabbagh, Sajjad Rahmani; Faculty Member; Department of Mechanical Engineering; KU Arçelik Research Center for Creative Industries (KUAR) / KU Arçelik Yaratıcı Endüstriler Uygulama ve Araştırma Merkezi (KUAR); Koç University Research Center for Translational Medicine (KUTTAM) / Koç Üniversitesi Translasyonel Tıp Araştırma Merkezi (KUTTAM); School of Medicine; College of Engineering; Graduate School of Sciences and Engineering; Graduate School of Social Sciences and Humanities; 184359; 291971; N/A; N/AGlioma, as an aggressive type of cancer, accounts for virtually 80% of malignant brain tumors. Despite advances in therapeutic approaches, the long-term survival of glioma patients is poor (it is usually fatal within 12-14 months). Glioma-on-chip platforms, with continuous perfusion, mimic in vivo metabolic functions of cancer cells for analytical purposes. This offers an unprecedented opportunity for understanding the underlying reasons that arise glioma, determining the most effective radiotherapy approach, testing different drug combinations, and screening conceivable side effects of drugs on other organs. Glioma-on-chip technologies can ultimately enhance the efficacy of treatments, promote the survival rate of patients, and pave a path for personalized medicine. In this perspective paper, we briefly review the latest developments of glioma-on-chip technologies, such as therapy applications, drug screening, and cell behavior studies, and discuss the current challenges as well as future research directions in this field.Publication Open Access 3D printed microneedles for point of care biosensing applications(Multidisciplinary Digital Publishing Institute (MDPI), 2022) Department of Mechanical Engineering; Sarabi, Misagh Rezapour; Nakhjavani, Sattar Akbar; Taşoğlu, Savaş; Faculty Member; Department of Mechanical Engineering; Koç University Research Center for Translational Medicine (KUTTAM) / Koç Üniversitesi Translasyonel Tıp Araştırma Merkezi (KUTTAM); KU Arçelik Research Center for Creative Industries (KUAR) / KU Arçelik Yaratıcı Endüstriler Uygulama ve Araştırma Merkezi (KUAR); Koç Üniversitesi İş Bankası Yapay Zeka Uygulama ve Araştırma Merkezi (KUIS AI)/ Koç University İş Bank Artificial Intelligence Center (KUIS AI); Graduate School of Sciences and Engineering; College of Engineering; N/A; N/A; 291971Microneedles (MNs) are an emerging technology for user-friendly and minimally invasive injection, offering less pain and lower tissue damage in comparison to conventional needles. With their ability to extract body fluids, MNs are among the convenient candidates for developing biosensing setups, where target molecules/biomarkers are detected by the biosensor using the sample collected with the MNs. Herein, we discuss the 3D printing of microneedle arrays (MNAs) toward enabling point-of-care (POC) biosensing applications.Publication Open Access Broadband and band-limited random vibration energy harvesting using a piezoelectric patch on a thin plate(Society of Photo-optical Instrumentation Engineers (SPIE), 2014) Erturk, Alper; Department of Mechanical Engineering; Arıdoğan, Mustafa Uğur; Başdoğan, İpek; PhD Student; Faculty Member; Department of Mechanical Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; 179940This paper presents analytical modeling and case studies of broadband and band-limited random vibration energy harvesting using a piezoceramic patch attached on a thin plate. The literature of vibration-based energy harvesting has been mostly focused on resonant cantilevered structures. However, cantilevered beam-type harvesters have limited broadband vibration energy harvesting capabilities unless they are combined with a nonlinear component. Moreover, cantilever arrangements cannot always be mounted on thin structures (which are basic components of marine, aerospace, and ground transportation systems) without significantly affecting the host system's design and overall dynamics. A patch-based piezoelectric energy harvester structurally integrated to a thin plate can be a proper alternative to using resonant cantilevers for harvesting energy from thin structures. Besides, plate-like structures have more number of vibration modes compared to beam structures, offering better broadband performance characteristics. In this paper, we present analytical modelling of patch-based piezoelectric energy harvester attached on a thin plate for random vibrations. The analytical model is based on electromechanically-coupled distributed-parameter formulation and validated by comparing the electromechanical frequency response functions (FRFs) with experimental results. Example case studies are then presented to investigate the expected power output of a piezoceramic patch attached on an aluminum plate for the case of random force excitations. The effect of bandwidth of random excitation on the mean power and shunted mean-square vibration response are explored with a focus on the number of vibration modes covered in the frequency range of input power spectral density (PSD).