Researcher: Meral, Faik Can
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Meral, Faik Can
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Publication Metadata only Design methodology microelectromechanical systems. Case study: torsional scanner mirror(Asme-Amer Soc Mechanical Eng, 2007) N/A; N/A; Department of Mechanical Engineering; Department of Mechanical Engineering; Meral, Faik Can; Başdoğan, İpek; Master Student; Faculty Member; Graduate School of Sciences and Engineering; College of Engineering; N/A; 179940Future optical microsystems, such as microelectromechanical system (MEMS) scanners and micromirrors, will extend the resolution and sensitivity offered by their predecessors. These systems face the challenge of achieving nanometer precision subjected to various disturbances. Predicting the performance of such systems early in the design process can significantly impact the design cost and also improve the quality, of the design. Our approach aims to predict the performance of such systems under various disturbance sources and develop a generalized design approach for MEMS structures. In this study, we used ANSYS for modeling and dynamic analysis of a torsional MEMS scanner mirror. ANSYS modal analysis results, which are eigenvalues (natural frequencies) and eigenvectors (mode shapes), are used to obtain the state-space representation of the mirror. The state-space model of the scanner mirror was reduced using various reduction techniques to eliminate the states that are insignificant for the transfer functions of interest. The results of these techniques were compared to obtain the best approach to obtain a lower order model that still contains all the relevant dynamics of the original model. After the model size is reduced significantly, a disturbance analysis is performed using Lyapunov approach to obtain root-mean-square values of the mirror rotation angle under the effect of a disturbance torque. The magnitude levels of the disturbance torque are obtained using an experimental procedure. The disturbance analysis framework is combined with the sensitivity analysis to determine the critical design parameters for optimizing the system performance.Publication Metadata only Dynamic analysis of a torsional mems scanner mirror, part 1: disturbance analysis framework(Amer Soc Mechanical Engineers, 2005) N/A; N/A; Department of Mechanical Engineering; Department of Mechanical Engineering; Meral, Faik Can; Başdoğan, İpek; Master Student; Faculty Member; Graduate School of Sciences and Engineering; College of Engineering; N/A; 179940Future optical micro systems such as Micro Electro Mechanical Systems (MEMS) scanners and micro-mirrors will extend the resolution and sensitivity offered by their predecessors. These systems face the challenge of achieving nanometer precision subjected to various disturbances. Predicting the performance of such systems early in the design process can significantly impact the design cost and also improve the quality of the design. Our approach aims to predict the performance of such systems under various disturbance sources and develop a generalized design approach for MEMS structures. In this study, we used ANSYS for modeling and analysis of a torsional MEMS scanner mirror. ANSYS modal analysis results, which are eigenvalues (natural frequencies) and eigenvectors (modeshapes), are used to obtain the state space representation of the mirror. The state space model of the scanner mirror was reduced using various reduction techniques to eliminate the states that are insignificant for the transfer functions of interest. The results of these techniques were compared to obtain the best approach to obtain a lower order model that still contains all of the relevant dynamics of the original model. After the model size is reduced significantly, a disturbance analysis is performed using Lyapunov approach to obtain root-mean-square (RMS) values of the mirror rotation angle under the effect of a disturbance torque. The Lyapunov approach results were validated using a time domain analysis.Publication Metadata only Dynamic analysis of a torsional mems scanner mirror, part 2: sensitivity analysis framework(Amer Soc Mechanical Engineers, 2005) N/A; N/A; Department of Mechanical Engineering; Department of Mechanical Engineering; Meral, Faik Can; Başdoğan, İpek; Master Student; Faculty Member; Graduate School of Sciences and Engineering; College of Engineering; N/A; 179940Next generation optical Micro Electro Mechanical Systems (MEMS) such as micro mirrors and micro scanners will extend the resolution and sensitivity offered by their predecessors. It is advantageous to predict the performance of such systems early in the design stage. In this study, we developed a sensitivity analysis framework to investigate the effect of the modal and physical parameters on the performance of a torsional MEMS scanner. The sensitivity framework described in this paper is related to the disturbance analysis framework which was introduced in the first part of this study. Disturbance analysis framework uses the Lyapunov Approach to obtain root-mean-square (R-MS) values of the mirror rotation angle under the effect of a disturbance torque. Analytical formulas were derived for the calculation of the modal parameter sensitivities and the results were verified by the finite difference method. The analytical formulas for the calculation of physical parameter sensitivities were described but they were found to be very inefficient due to the complexity and computational expense in calculating the eigenvalue and eigenvector derivatives included in these equations. Instead, the finite difference method was used to calculate the physical parameter sensitivities for the torsional MEMS scanner.