Researcher: Yazgı, Sertaç Güneri
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Publication Metadata only A novel triaxial optoelectronic based dynamometer for machining processes(Elsevier Science Sa, 2018) N/A; N/A; Department of Mechanical Engineering; Subaşı, Ömer; Yazgı, Sertaç Güneri; Lazoğlu, İsmail; PhD Student; Master Student; Faculty Member; Department of Mechanical Engineering; Manufacturing and Automation Research Center (MARC); Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; N/A; 179391A compact triaxial dynamometer for detecting the cutting forces in machining is developed. force measurements are performed using photo-interrupters. Structural parameters of a monolithic flexural component are chosen through parametric analysis for coupling the exerted forces with the optical sensors. a prototype of the dynamometer is manufactured, and the calibration tests are conducted in three orthogonal directions to determine the linearity, hysteresis, repeatability and resolution. force measurements are also compared with a reference dynamometer (Kistler 9256C1). Modal analysis and milling tests are performed to observe the dynamic properties and operability of the force sensor for machining applications. Results of the experimental studies validate that the proposed sensor is a feasible low-cost solution for force measurement in machining without compromising reliability and accuracy.Publication Open Access Line edge roughness metrology software(American Institute of Physics (AIP) Publishing, 2020) Ivanov, Tzvetan; Holz, Mathias; Rangelow, Ivo W.; Department of Mechanical Engineering; Alaca, Burhanettin Erdem; Yazgı, Sertaç Güneri; Faculty Member; Master Student; Department of Mechanical Engineering; College of Engineering; Graduate School of Sciences and Engineering; 115108; N/AA line edge roughness analysis software is developed based on the Canny edge detection algorithm with a double threshold, where threshold values are obtained by Otsu's method. The performance of the software is demonstrated on features with a 200-nm nominal pitch generated by current-controlled, field-emission scanning probe lithography. Two lithographic modes are applied: (a) direct self-development positive mode and (b) image reversal mode. Atomic force imaging is used to analyze the line edge roughness. This is followed by a benchmarking study, where findings are compared to those provided by metroler software (Fractilia, LLC). This work is the first report on both line edge roughness involving imaging using the same exposure setup and latent image line edge roughness-made possible thanks to the resolving power of imaging through noncontact AFM. The authors are presenting a comparison of patterning through image reversal of the calixarene molecular glass resist from negative-tone to positive-tone as well as direct-write. In image reversal, a close match was observed between the proposed analysis and metroler software for line edge roughness and linewidth.