Researcher:
Seren, Hüseyin Rahmi

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Master Student

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Hüseyin Rahmi

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Seren

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Seren, Hüseyin Rahmi

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2008 - 200962010 - 20114

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Researcher Of Publications: search.filters.isAuthorOfPublication.41105128-f0c1-4323-839f-efd805052db9

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Now showing 1 - 10 of 10
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    Mechanically coupled comb drive MEMS stages
    (IEEE, 2008) Hedsten, Karin; Enoksson, Peter; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Arslan, Aslıhan; Ataman, Çağlar; Holmstrom, Sven; Seren, Hüseyin Rahmi; Ürey, Hakan; Researcher; PhD Student; Researcher; Master Student; Faculty Member; Department of Electrical and Electronics Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; N/A; N/A; N/A; 8579
    An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications. 9 pm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
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    MEMS fourier transform spectrometer
    (IEEE, 2011) Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Ürey, Hakan; Ayerden, Nadire Pelin; Holmstrom, Sven; Seren, Hüseyin Rahmi; Faculty Member; Master Student; Researcher; Master Student; Department of Electrical and Electronics Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; 8579; N/A; N/A; N/A
    A comb actuated lamellar grating interferometer based MEMS Fourier Transform Infrared (FTIR) Spectrometer device is designed, fabricated and characterized. The device operates at out-of-plane resonant mode which will allow ultra miniaturized, sensitive, robust, and fast spectrometers. As a novel approach pantograph type springs are used in the mechanical design to achieve high deflections. The dynamic deformation on the gratings is minimized using additional suspension springs. Optical simulations are conducted to extensively analyze the device performance in terms of spectral resolution and signal-to-bias ratio (SBR). In the light of simulations and experiments, the grating geometry is optimized for the region of wavelengths of interest (2.5-16 μm). Comb structures are designed and placed around pantograph springs for low voltage operation. The fabrication process is developed based on CMOS compatible bulk micromachining of a silicon-on-insulator wafer. A maximum peak to peak mechanical deflection of 478 μm is acquired with 50 V p-p input voltage in ambient pressure.
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    Optical characterization of micro and nanomechanical systems in two dimensions
    (Elsevier Science Sa, 2009) N/A; Department of Electrical and Electronics Engineering; Seren, Hüseyin Rahmi; Ürey, Hakan; Master Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; 8579
    A simple optical setup combining interferometric and knife-edge methods is proposed for deflection measurements and sensing both out-of-plane and in-plane movements of M EMS and NEMS devices. The setup has 100 pm/root Hz in-plane measurement resolution for I mu m full-width-half-maximum spot size illumination and 4 pm/root Hz out-of-plane resolution. The sensor offers large dynamic range. Sensor setup can also be used to measure and differentiate combined modes in some cases.
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    Miniaturized FR4 spectrometers
    (Ieee, 2009) N/A; N/A; N/A; N/A; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Seren, Hüseyin Rahmi; Ferhanoğlu, Onur; Hatipoğlu, Gökhan; Boyman, Mişel; Ölçer, Selim; Ataman, Çağlar; Ürey, Hakan; Master Student; PhD Student; Master Student; Undergraduate Student; Other; PhD Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; College of Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; 205198; N/A; N/A; N/A; N/A; 8579
    A miniaturized and electromagnetically driven FR4 based moving platform is developed for Fourier Transform spectrometer applications. Both Michelson interferometer and Lamellar Grating interferometer configurations are demonstrated. +/- 500 mu m translational motion (corresponding to 5 cm(-1) spectral resolution) is demonstrated with the moving platform. Two methods are proposed and partially demonstrated for pure translational motion: (I) integrated control system using a quad photo detector feedback and (2) corner cube retroreflector. The fundamental advantages and the limits of the lamellar grating interferometers are also discussed.
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    Lamellar grating based MEMS fourier transform spectrometer
    (IEEE, 2010) Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; N/A; Ürey, Hakan; Ayerden, Nadire Pelin; Holmstrom, Sven; Seren, Hüseyin Rahmi; Faculty Member; Master Student; Researcher; Master Student; Department of Electrical and Electronics Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; 8579; N/A; N/A; N/A
    A Lamellar grating interferometer based Fourier Transform Infrared Spectrometer (FTIR) with out-of-plane resonant mode is implemented and characterized. Device has 10mm∧2 clear aperture. Dynamic diffraction grating is comb-actuated and a maximum p-p deflection of 355 μm is obtained at 76 V. The excitation frequency is 971 Hz and deflection frequency of 485.5Hz.
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    Lamellar grating optimization for miniaturized fourier transform spectrometers
    (Optical Soc Amer, 2009) Lüttjohann, Stephan; N/A; N/A; Department of Electrical and Electronics Engineering; Ferhanoğlu, Onur; Seren, Hüseyin Rahmi; Ürey, Hakan; PhD Student; Master Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; College of Engineering; 205198; N/A; 8579
    Microfabricated Lamellar grating interferometers (LGI) require fewer components compared to Michelson interferotemeters and offer compact and broadband Fourier transform spectrometers (FTS) with good spectral resolution, high speed and high efficiency. This study presents the fundamental equations that govern the performance and limitations of LGI based FTS systems. Simulations and experiments were conducted to demonstrate and explain the periodic nature of the interferogram envelope due to Talbot image formation. Simulations reveal that the grating period should be chosen large enough to avoid Talbot phase reversal at the expense of mixing of the diffraction orders at the detector. Optimal LGI grating period selection depends on a number of system parameters and requires compromises in spectral resolution and signal-to-bias ratio (SBR) of the interferogram within the spectral range of interest. New analytical equations are derived for spectral resolution and SBR of LGI based FTS systems. (C) 2009 Optical Society of America
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    Lamellar grating interferometer based compact ft spectrometers
    (IEEE, 2009) N/A; N/A; (TBD); Ferhanoğlu, Onur; Seren, Hüseyin Rahmi; Ürey, Hakan; PhD Student; Master Student; Faculty Member; (TBD); Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; 205198; N/A; 8579
    Lamellar grating interferometers (LGI) offer compact spectrometer architecture with high spectral resolution and large clear aperture. This study investigates the diffraction based inherent limitations of LGI spectrometers in contrary to conventional Michelson type spectrometer architecture. Simulations and experiments were conducted to demonstrate and explain periodic nature of the interferogram envelope due to Talbot image formation. Simulations reveal that grating period should be chosen large enough to avoid Talbot phase reversal at the expense of mixing diffraction orders. Overall optimization effort on the LGI system reveals that it is possible to build compact spectrometers to be used directly in the field without any performance degradation in contrary to bulky FTIR systems.
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    MEMS fourier transform IR spectrometer
    (IEEE, 2011) Sandner, Thilo; Luettjohann, Stephan; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; N/A; Ürey, Hakan; Holmstrom, Sven; Ölçer, Selim; Seren, Hüseyin Rahmi; Sharma, Jaibir; Ayerden, Nadire Pelin; Faculty Member; Researcher; Other; Master Student; Researcher; Master Student; Department of Electrical and Electronics Engineering; College of Engineering; College of Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; 8579; N/A; N/A; N/A; N/A; N/A
    A comb-actuated MEMS lamellar grating FTIR spectrometer with maximum OPD of 652μm and clear aperture area of 9.6mm2 is developed. Laser and IR interferograms in 2.5-16μm wavelength band are acquired at ambient pressure.
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    2D scanning MEMS stage integrated with microlens arrays for high-resolution beam steering
    (IEEE, 2009) Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; N/A; N/A; N/A; Ürey, Hakan; Gökçe, Sertan Kutal; Holmstrom, Sven; Arslan, Aslıhan; Ataman, Çağlar; Seren, Hüseyin Rahmi; Faculty Member; Master Student; Researcher; Master Student; PhD Student; Master Student; Other; Department of Electrical and Electronics Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; N/A; 8579; N/A; N/A; N/A; N/A; N/A; N/A
    A novel MEMS stage using one set of comb fingers, capable of 2-axis motion is designed and developed. With an integrated 1.1mm square microlens-array it deflects 40um in-plane at 60V and 95um out-of-plane at 100V.
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    PublicationOpen Access
    MEMS scanners for display, imaging, and spectroscopy and their dynamic characterization
    (Society of Photo-optical Instrumentation Engineers (SPIE), 2010) Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; Seren, Hüseyin Rahmi; Ürey, Hakan; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; 8579
    Moving micro-mechanical structures combined with laser light sources and micro-optics enable a number of powerful applications in display, imaging, and spectroscopy. Examples of systems developed in our laboratory are: rotational scanners developed for micro-projectors, dynamic diffraction gratings with large out-of-plane motion developed for Fourier Transform spectrometers, and 2 degree-of-freedom MEMS stages that carry micro-lens arrays for laser beam steering and imaging applications. Precise control of motion is critical in all those applications. We developed a number of optical characterization tools for point-based and full-field dynamic characterization of micro and nano mechanical structures. In this paper, we first briefly discuss the applications and then describe the details of the optical characterization tools. First setup is a stroboscopic interferometry for dynamic deformation analysis. Second setup is a simple technique for simultaneous in-plane and out-of-plane measurement with nanometric precision. The setup is constructed using one photo detector and a Mirau-type interference objective. For out-of-plane measurements, interference fringes are used to compute the the deflection amount. For in-plane measurements, knife edge technique is used to modulate the reflected beam intensity using a sharp edge in the object. Third setup is a simple optical angle sensor for rotational mirrors, which uses only one bi-cell photo detector. The setup is able to measure amplitude, phase, and quality factor of torsional devices.