Researcher:
Toy, Muhammed Fatih

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Master Student

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Muhammed Fatih

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Toy

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Toy, Muhammed Fatih

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2007 - 20096

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Researcher Of Publications: search.filters.isAuthorOfPublication.67795e70-4891-4b03-b53e-53a093c6f56e

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Now showing 1 - 6 of 6
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    Thermal-mechanical detector array with integrated diffraction grating
    (IEEE, 2007) Unal, G.; Kalyoncu, H.; Kabuli, G.; Caliskan, A. U.; N/A; N/A; Department of Electrical and Electronics Engineering; Ferhanoğlu, Onur; Toy, Muhammed Fatih; Ürey, Hakan; PhD Student; Master Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; College of Engineering; 205198; N/A; 8579
    An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve <50mK NETD using a 12 bit CCD camera.
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    MOEMS thermal imaging camera
    (Ieee, 2008) Torun, Hamdi; Degertekin, F. Levent; N/A; N/A; Department of Electrical and Electronics Engineering; Toy, Muhammed Fatih; Ferhanoğlu, Onur; Ürey, Hakan; PhD Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; Collage of Engineering; N/A; 205198; 8579
    A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.
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    Two-wavelength grating interferometry for MEMS sensors
    (IEEE-inst Electrical Electronics Engineers inc, 2007) N/A; N/A; Department of Electrical and Electronics Engineering; Ferhanoğlu, Onur; Toy, Muhammed Fatih; Ürey, Hakan; PhD Student; Master Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; College of Engineering; 205198; N/A; 8579
    Diffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited subnanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. a two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. the two-laser illumination extended the detection range from 105 nm to 1.7 mu m assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.
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    Vacuum package design for a MEMS based IR detector array
    (2007) Karioja P.; Ollila J.; Department of Electrical and Electronics Engineering; N/A; N/A; Ürey, Hakan; Ferhanoğlu, Onur; Toy, Muhammed Fatih; Faculty Member; PhD Student; Master Student; Department of Electrical and Electronics Engineering; College of Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; 8579; 205198; N/A
    A vacuum package was designed and manufactured for the testing of a MEMS-based thermal imaging detector array. Optimum operation of the pixel array requires low pressure and stabilized temperature. The pixel array devices are under development; therefore, the package needs to be reusable as a test fixture for chip revisions. Two optical windows are required: the top window to be transmissive at the long-wave infra-red (LWIR) wavelengths and the bottom window at visible (VIS) readout wavelengths. Thermal noise is a fundamental source deteriorating the performance of the pixel array; hence, a thermocoupler, thermo electric cooler (TEC) and heatsink were included in the package to allow thermal stabilization. To minimize the thermal noise, the TEC and heatsink were located between the VIS window and the pixel array. Such a configuration for thermal stabilization resulted in the use of special TEC and heatsink designs that include holes matched with the VIS window size. Simulations on pixel array performance indicate a 1 mTorr vacuum pressure to provide the optimum performance of the pixel array. In order to meet the vacuum requirement, a Kovar package with the minimum possible size, considering the size of elements assembled in the package, was chosen. The removable ZnSe IR window was hermetically sealed with an O-ring and vacuum grease. The VIS window was glass soldered to the bottom of the package. Active pressure control was obtained by a vacuum pump.
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    Two-wavelength grating interferometry for extended range MEMS metrology
    (IEEE, 2007) N/A; N/A; Department of Electrical and Electronics Engineering; Toy, Muhammed Fatih; Ferhanoğlu, Onur; Ürey, Hakan; Master Student; PhD Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; 205198; 8579
    Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. a two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105nm to 1.7um assuming sensitivity is maintained at > 50% of the maximum sensitivity.
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    Uncooled infrared thermo-mechanical detector array: design, fabrication and testing
    (Elsevier Science Sa, 2009) Torun, Hamdi; N/A; N/A; Department of Electrical and Electronics Engineering; Toy, Muhammed Fatih; Ferhanoğlu, Onur; Ürey, Hakan; Master Student; PhD Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; 205198; 8579
    Thermo-mechanical detector arrays in the 160 x 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30mK NETD is achievable using >12-bit CCD camera for the readout.