Researcher:
Baran, Utku

Profile Picture
ORCID

Job Title

Master Student

First Name

Utku

Last Name

Baran

Name

Name Variants

Baran, Utku

Email Address

Birth Date

Filters

2011 - 20149

Advanced Search

Filter by

Settings

Researcher Of Publications: search.filters.isAuthorOfPublication.7889485a-fc34-4b98-ac64-1e41f81d580e

Search Results

Now showing 1 - 9 of 9
  • Placeholder
    PublicationMetadata only
    Resonant PZT MEMS scanners with integrated angle sensors
    (IEEE Computer Society, 2014) Brown, Dean; Davis, Wyatt; N/A; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Baran, Utku; Holmstrom, Sven; Çakmak, Onur; Ürey, Hakan; Master Student; Researcher; PhD Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; N/A; N/A; 8579
    Several high performing PZT-actuated MEMS laser scanners utilizing mechanical coupling are designed, fabricated, and characterized. Optical angles up to 59.3 deg. and θoptD·fn-products up to 3052 deg.·mm·Hz are demonstrated. These are the highest performing MEMS scanners in the literature. An angle sensor is integrated into one scanner design without any additional processing. The sensor response shows a linear relationship with the mirror rotation. A closed-loop drive was demonstrated using the scanner output.
  • Placeholder
    PublicationMetadata only
    Resonant PZT MEMS scanner for high-resolution displays
    (IEEE-Inst Electrical Electronics Engineers Inc, 2012) Brown, Dean; Balma, Davide; Davis, Wyatt O.; Muralt, Paul; N/A; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; Baran, Utku; Holmstrom, Sven; Ürey, Hakan; Master Student; Researcher; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; College of Engineering; College of Engineering; N/A; N/A; 8579
    A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at the mechanical resonance frequency of 40 kHz provides an optical scan angle of 38.5 degrees for the 1.4-mm-wide mirror. This scanner is a significant step toward achieving full-high-definition resolution (1920 x 1080 pixels) in mobile laser projectors without the use of vacuum packaging. The reported piezoscanner requires no bulky components and consumes < 30-mW power at maximum deflection, thus providing significant power and size advantages, compared with reported electromagnetic and electrostatic scanners. Interferometry measurements show that the dynamic deformation is at acceptable levels for a large fraction of the mirror and can be improved further for diffraction-limited performance at full resolution. A design variation with a segmented electrode pair illustrated that reliable angle sensing can be achieved with PZT for closed-loop control of the scanner. [2012-0116]
  • Placeholder
    PublicationMetadata only
    MEMS scanners and emerging 3D and interactive Augmented Reality display applications
    (Institute of Electrical and Electronics Engineers (IEEE), 2013) Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; N/A; N/A; N/A; N/A; Ürey, Hakan; Holmstrom, Sven; Baran, Utku; Akşit, Kaan; Hedili, M. Kıvanç; Eldeş, Osman; Faculty Member; Researcher; Master Student; PhD Student; Master Student; Master Student; Department of Electrical and Electronics Engineering; College of Engineering; College of Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; 8579; N/A; N/A; N/A; N/A; N/A
    MEMS scanners have advanced rapidly during the last 20 years thanks to the excellent mechanical and optical properties offered by silicon. They have been used in various display and imaging products. The performance of high resolution and high frequency MEMS laser scanners is close to meeting the demands of full HD displays (120 million pixels per second). Important performance metrics and the performance of various electromagnetic, electrostatic, and piezoelectric actuated MEMS scanners developed in our group are reviewed and recent improvements in the piezoelectric actuated resonant MEMS scanner is presented. Second part of the paper is about some of the emerging 3D and interactive Augmented-Reality display applications enabled by pico-projectors using MEMS scanners. Those technologies are expected to play an important role in the future of human-computer interface.
  • Placeholder
    PublicationMetadata only
    High frequency torsional mems scanner for displays
    (IEEE, 2012) Brown D.; Balma D.; Davis W.O.; Mazzalai A.; Muralt P.; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Ürey, Hakan; Baran, Utku; Holmstrom, Sven; Faculty Member; Master Student; Researcher; Department of Electrical and Electronics Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; 8579; N/A; N/A
    A high frequency resonant torsional microscanner actuated with thin film PZT is modeled, fabricated, and characterized. Sinusoidal actuation with 24 V at a mechanical resonance frequency of 39870 Hz provides a total optical scan angle of 38.5 deg. for the 1.4 mm wide mirror. It provides significant power and size advantages compared to electromagnetically and electrostatically actuated scanners. This scanner is a significant step towards achieving full HD resolution with mobile laser projectors.
  • Placeholder
    PublicationMetadata only
    A built-in vibration sensor using ARC-discharged reactive ion plated PZT
    (The Institute of Electrical Engineers of Japan, 2011) Tani, Masanao; Akamatsu, Masahiro; Yasuda, Yoshiaki; Fujita, Hiroyuk; Toshiyoshi, Hiroshi; N/A; Baran, Utku; Master Student; Graduate School of Sciences and Engineering; N/A
    A piezoelectrically excited micro cantilever with multiple electrode ports has been developed as a standard test device to investigate the piezoelectric oscillation sensing capability. A 5 μm thick PZT was deposited by the arc-discharge reactive ion plating on a 20-μm-thick and 2700-μm-long SOI cantilever, and its piezoelectrically measured vibration signal was correlated with the reference oscillation signal from the laser Doppler vibrometer to prove the feasibility as oscillation detector. An equivalent circuit expression for the sensing electrode has been found.
  • Placeholder
    PublicationMetadata only
    MEMS rotary stage with linear stiffness
    (IEEE, 2011) Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; N/A; N/A; N/A; N/A; Ürey, Hakan; Gökçe, Sertan Kutal; Holmstrom, Sven; Baran, Utku; Sharma, Jaibir; Davis, Wyatt O.; Brown, Dean; Faculty Member; Master Student; Researcher; Master Student; Other; N/A; N/A; Department of Electrical and Electronics Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; N/A; N/A; N/A; 8579; N/A; N/A; N/A; N/A; N/A
    A comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate ±7deg. and ±4.5deg at vacuum and ambient pressure, respectively.
  • Placeholder
    PublicationMetadata only
    FR4 electromagnetic scanner based fourier transform spectrometer
    (ASME, 2011) Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; N/A; Ürey, Hakan; Baran, Utku; Ölçer, Selim; Hedili, M. Kıvanç; Faculty Member; Master Student; Other; Master Student; Department of Electrical and Electronics Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; 8579; N/A; N/A; N/A
    Fourier transform spectrometers require an interferometric optical setup, where a precisely controlled motion of a mirror on a moving stage and a reference mirror are required. FR4, a common printed circuit board substrate, and the standard PCB technology is used to develop a simple gimbaled scanner structure with high precision to implement into a low-cost and viable Fourier Transform Spectrometer. On top of the corner cube reflector based tilt-insensitive setup, magnetic actuation optimization using twin opposing magnets solution is found to be helpful to enhance interference data. Large Lorentz force is generated for out-ofplane deflection while the torsional motion of the scanner is restricted. ±162.8um out-ofplane translation at 149 Hz resonance is realized with torsion effect deteriorated result which corresponds to <1nm spectral resolution at visible wavelengths.
  • Placeholder
    PublicationMetadata only
    MEMS rotary stage with linear stiffness
    (Ieee, 2011) N/A; N/A; N/A; Department of Electrical and Electronics Engineering; N/A; N/A; Department of Electrical and Electronics Engineering; Baran, Utku; Davis, Wyatt O.; Holmstrom, Sven; Brown, Dean; Sharma, Jaibir; Gökçe, Sertan Kutal; Ürey, Hakan; Master Student; Other; Researcher; Other; Other; Master Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; N/A; College of Engineering; N/A; N/A; College of Engineering; N/A; N/A; N/A; N/A; N/A; N/A; 8579
    A comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate +/- 7deg. and +/- 4.5deg at vacuum and ambient pressure, respectively.
  • Placeholder
    PublicationMetadata only
    Linear-stiffness rotary MEMS stage
    (IEEE-Inst Electrical Electronics Engineers Inc, 2012) Davis, Wyatt O.; Brown, Dean; N/A; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Baran, Utku; Holmstrom, Sven; Sharma, Jaibir; Gökçe, Sertan Kutal; Ürey, Hakan; Master Student; Researcher; Researcher; Master Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; College of Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; N/A; N/A; N/A; 8579
    A novel bending flexure spring design is presented, providing linear stiffness for large rotations of a suspended body. Over 98% linear motion for up to +/- 7 degrees mechanical scan angle is achievable with the new suspension design. [2011-0292]