Researcher:
Şardan, Özlem

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Master Student

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Özlem

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Şardan

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Şardan, Özlem

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2006 - 20074

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    Batch fabrication of self-assembled nickel-iron nanowires by electrodeposition
    (IEEE, 2006) N/A; Department of Electrical and Electronics Engineering; Department of Mechanical Engineering; Şardan, Özlem; Yalçınkaya, Arda Deniz; Alaca, Burhanettin Erdem; Master Student; Researcher; Faculty Member; Department of Electrical and Electronics Engineering; Department of Mechanical Engineering; Graduate School of Sciences and Engineering; College of Engineering; College of Engineering; N/A; 144523; 115108
    Lack of batch-compatible fabrication techniques can be considered as the most important challenge in the integration of nanostructures with microelectromechanical systems (MEMS). a solution to the micro-nano integration problem is offered by introducing a batch-compatible nanowire fabrication technique based on basic lithographic techniques and guided self-assembly. the basic principle is obtaining cracks at predetermined locations in a sacrificial SiO2 layer on Si and filling these cracks with a suitable metal by electrodeposition. the technique is demonstrated by using Nickel-Iron as the deposition material and verifying the magnetic behavior of resulting nanowires.
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    Self-assembly-based batch fabrication of nickel-iron nanowires by electroplating
    (IOP Publishing Ltd, 2006) N/A; Department of Electrical and Electronics Engineering; Department of Mechanical Engineering; Şardan, Özlem; Yalçınkaya, Arda Deniz; Alaca, Burhanettin Erdem; Master Student; Researcher; Faculty Member; Department of Electrical and Electronics Engineering; Department of Mechanical Engineering; Graduate School of Sciences and Engineering; College of Engineering; College of Engineering; N/A; 144523; 115108
    The reason behind the majority of difficulties encountered in the integration of nanoscale objects with microelectromechanical systems can almost always be traced back to the lack of batch-compatible fabrication techniques at the nanoscale. On the one hand, self-assembly products do not allow a high level of control on their orientation and numbers, and hence, their attachment to a micro device is problematic. On the other hand, top-down approaches, such as e-beam lithography, are far from satisfying the needs of mass fabrication due to their expensive and serial working principle. To overcome the difficulties in micro-nano integration, a batch-compatible nanowire fabrication technique is presented, which is based on fabricating nanowires using simple lithographic techniques and relying on guided self-assembly. The technique is based on creating cracks with a predetermined number and orientation in a thin SiO2 coating on Si substrate, and then filling the cracks with an appropriate material of choice. After the SiO2 coating is removed, nanowires remain on the Si surface as a replica of the crack network. The technique, previously confined to electroless deposition, is now extended to include electroplating, enabling the fabrication of nanowires of various alloys. As an example, arrays of NiFe nanowires are introduced and their magnetic behaviour is verified.
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    Microfabricated tools for pick-and-place of nanoscale components
    (Elsevier, 2006) Bøggild, Peter; Petersen, Dirch Hjorth; Kjelstrup-Hansen, Jakob; Mølhave, Kristian; Andersen, Karin Nordstrøm; Şardan, Özlem; Master Student; Graduate School of Sciences and Engineering; N/A
    We present a high-aspect ratio three-beam electro-thermally actuated gripper made from single-crystalline, highly doped silicon, and compare the performance to a five-electrode electrostatic gripper in terms of actuation and manipulation capabilities. The electrothermal gripper can be configured in a number of different ways, which leads to a high degree of adaptability to various manipulation scenarios. Finally, we consider different options for customising the gripper microcantilevers by add-on nanotips.
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    Route to batch-compatible fabrication of nanotweezers by guided self-assembly
    (IEEE, 2007) Bøggild, Peter; Tang, P. Torben; Hansen, Ole; N/A; Department of Mechanical Engineering; Department of Electrical and Electronics Engineering; Şardan, Özlem; Alaca, Burhanettin Erdem; Yalçınkaya, Arda Deniz; Master Student; Faculty Member; Researcher; Department of Mechanical Engineering; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; College of Engineering; College of Engineering; N/A; 115108; 144523
    Fabrication of integrated micro and nanoscale components in a single batch is one of the biggest challenges for nanosystems developement. A self-assembly technique that enables "batch-compatible" integration of micro electro mechanical systems with nanoribbons is presented by demonstrating electrostatically actuated combdrive microgrippers with nanoribbon end-effectors. Preliminary fabrication results demonstrate the possibility of obtaining well defined spatial density and orientation of nanoribbons matching the precision of top-down techniques and at the same time allowing complete alignment and registry with subsequent lithography steps.