Researcher:
Ayerden, Nadire Pelin

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Master Student

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Nadire Pelin

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Ayerden

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Ayerden, Nadire Pelin

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2010 - 20146

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Researcher Of Publications: search.filters.isAuthorOfPublication.ebb03dee-d42a-48d8-ab2f-2caf8e7e0233

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Now showing 1 - 6 of 6
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    MEMS fourier transform spectrometer
    (IEEE, 2011) Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; Ürey, Hakan; Ayerden, Nadire Pelin; Holmstrom, Sven; Seren, Hüseyin Rahmi; Faculty Member; Master Student; Researcher; Master Student; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; 8579; N/A; N/A; N/A
    A comb actuated lamellar grating interferometer based MEMS Fourier Transform Infrared (FTIR) Spectrometer device is designed, fabricated and characterized. The device operates at out-of-plane resonant mode which will allow ultra miniaturized, sensitive, robust, and fast spectrometers. As a novel approach pantograph type springs are used in the mechanical design to achieve high deflections. The dynamic deformation on the gratings is minimized using additional suspension springs. Optical simulations are conducted to extensively analyze the device performance in terms of spectral resolution and signal-to-bias ratio (SBR). In the light of simulations and experiments, the grating geometry is optimized for the region of wavelengths of interest (2.5-16 μm). Comb structures are designed and placed around pantograph springs for low voltage operation. The fabrication process is developed based on CMOS compatible bulk micromachining of a silicon-on-insulator wafer. A maximum peak to peak mechanical deflection of 478 μm is acquired with 50 V p-p input voltage in ambient pressure.
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    MEMS FTIR spectrometer and optical results
    (IEEE, 2012) Stehle, Jean-Louis; Holmstrom, Sven; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Ürey, Hakan; Ayerden, Nadire Pelin; Faculty Member; Master Student; College of Engineering; Graduate School of Sciences and Engineering; 8579; N/A
    MEMS LGI FTIR system is developed and optimized. Out-of-plane deflection >500μm is obtained at 350Hz using piezoelectric and acoustic actuation. Optical system is optimized to obtain the best spectrum. 20μm SOI film thickness is measured.
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    High-speed broadband FTIR system using MEMS
    (Optical Soc Amer, 2014) Stehle, Jean-Louis; N/A; N/A; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; Ayerden, Nadire Pelin; Aygün, Uğur; Holmstrom, Sven; Ölçer, Selim; Can, Başarbatu; Ürey, Hakan; Master Student; PhD Student; Researcher; Other; Master Student; Faculty Member; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; College of Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; N/A; N/A; N/A; N/A; 8579
    Current Fourier transform infrared spectroscopy (FTIR) systems have very good spectral resolution, but are bulky, sensitive to vibrations, and slow. We developed a new FTIR system using a microelectromechanical system (MEMS)-based lamellar grating interferometer that is fast, compact, and achromatic (i.e., does not require a beam splitter). The MEMS device has > 10 mm(2) active surface area, up to +/- 325 mu m mechanical displacement, and a 343 Hz resonant operation frequency. The system uses a 5 MHz bandwidth custom infrared (IR) detector and a small emission area custom blackbody source to achieve fast interferogram acquisition and compact form factor. Effects of lamellar grating period, detector size, laser reference, apodization, and averaging of data on the spectral resolution are discussed. The measurement time ranges from 1.5 to 100 ms depending on the averaging time. In the target range of 2.5-16 mu m (625- 4000 cm(-1)) a spectral resolution of 15-20 cm(-1) is demonstrated. The measurements are shown to be stable over a long time. (C) 2014 Optical Society of America
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    Lamellar grating based MEMS fourier transform spectrometer
    (IEEE, 2010) Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Ürey, Hakan; Ayerden, Nadire Pelin; Holmstrom, Sven; Seren, Hüseyin Rahmi; Faculty Member; Master Student; Researcher; Master Student; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; 8579; N/A; N/A; N/A
    A Lamellar grating interferometer based Fourier Transform Infrared Spectrometer (FTIR) with out-of-plane resonant mode is implemented and characterized. Device has 10mm∧2 clear aperture. Dynamic diffraction grating is comb-actuated and a maximum p-p deflection of 355 μm is obtained at 76 V. The excitation frequency is 971 Hz and deflection frequency of 485.5Hz.
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    MEMS fourier transform IR spectrometer
    (IEEE, 2011) Sandner, Thilo; Luettjohann, Stephan; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Ürey, Hakan; Holmstrom, Sven; Ölçer, Selim; Seren, Hüseyin Rahmi; Sharma, Jaibir; Ayerden, Nadire Pelin; Faculty Member; Researcher; Other; Master Student; Researcher; Master Student; College of Engineering; College of Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; 8579; N/A; N/A; N/A; N/A; N/A
    A comb-actuated MEMS lamellar grating FTIR spectrometer with maximum OPD of 652μm and clear aperture area of 9.6mm2 is developed. Laser and IR interferograms in 2.5-16μm wavelength band are acquired at ambient pressure.
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    Lamellar-grating-based mems fourier transform spectrometer
    (IEEE-Inst Electrical Electronics Engineers Inc, 2012) Seren, Hüseyin R.; Sharma, Jaibir; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; Holmstrom, Sven; Ayerden, Nadire Pelin; Ürey, Hakan; Researcher; Master Student; Faculty Member; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; N/A; 8579
    Design, fabrication, and characterization of a high-performance micromachined lamellar-grating-interferometer-based Fourier transform spectrometer are presented. The device is designed to give high deflections with very low dynamic deformation and good mode separation. Mechanical self-stoppers are introduced to withstand accelerations larger than 500 g due to shock. The clear aperture area of the grating is about 10 mm(2). The maximum deflection while electrostatically actuated at ambient conditions is +/- 356 mu m at 71.2 V and 340 Hz, setting a record for comparable devices. At a pressure of 8.6 Pa, the same deflection is reached at 4.3 V. Six hundred eighty spectra per second can be recorded with a resolution of 14 cm(-1). With a HeNe laser at 633 nm, a spectral resolution of 0.54 nm (22 cm(-1)) is reached using electrostatic actuation. The microelectromechanical systems device is integrated into a compact Fourier transform spectrometer setup including a blackbody source, an infrared (IR) detector, and a visible laser using the device back side for reference. Early results with IR interferograms are also reported. In addition, the devices are actuated with pressure waves in the ambient air to reach deflections up to +/- 700 mu m. With this setup, the spectrum of a red laser is measured with a resolution of 0.3 nm (12.4 cm (1)).