Researcher:
Holmstrom, Sven

Profile Picture
ORCID

Job Title

Researcher

First Name

Sven

Last Name

Holmstrom

Name

Name Variants

Holmstrom, Sven

Email Address

Birth Date

Filters

2007 - 200982010 - 201416

Advanced Search

Filter by

Settings

Researcher Of Publications: search.filters.isAuthorOfPublication.f6419e99-1062-421d-ad9f-b675e227b388

Search Results

Now showing 1 - 10 of 24
  • Placeholder
    PublicationMetadata only
    Resonant PZT MEMS scanners with integrated angle sensors
    (IEEE Computer Society, 2014) Brown, Dean; Davis, Wyatt; N/A; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Baran, Utku; Holmstrom, Sven; Çakmak, Onur; Ürey, Hakan; Master Student; Researcher; PhD Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; N/A; N/A; 8579
    Several high performing PZT-actuated MEMS laser scanners utilizing mechanical coupling are designed, fabricated, and characterized. Optical angles up to 59.3 deg. and θoptD·fn-products up to 3052 deg.·mm·Hz are demonstrated. These are the highest performing MEMS scanners in the literature. An angle sensor is integrated into one scanner design without any additional processing. The sensor response shows a linear relationship with the mirror rotation. A closed-loop drive was demonstrated using the scanner output.
  • Placeholder
    PublicationMetadata only
    Comb-actuated resonant torsional microscanner with mechanical amplification
    (IEEE-Inst Electrical Electronics Engineers Inc, 2010) Brown, Dean; Davis, Wyatt O.; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Arslan, Aslıhan; Holmstrom, Sven; Gökçe, Sertan Kutal; Ürey, Hakan; Researcher; Researcher; Master Student; Faculty Member; Department of Electrical and Electronics Engineering; College of Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; N/A; N/A; 8579
    A comb-actuated torsional microscanner is developed for high-resolution laser-scanning display systems. Typical torsional comb-drive scanners have fingers placed around the perimeter of the scanning mirror. In contrast, the structure in this paper uses cascaded frames, where the comb fingers are placed on an outer drive frame, and the motion is transferred to the inner mirror frame with a mechanical gain. The structure works only in resonant mode without requiring any offset in the comb fingers, keeping the silicon-on-insulator-based process quite simple. The design intent is to improve actuator efficiency by removing the high-drag fingers from the high-velocity scanning mirror. Placing them on the lower velocity drive frame reduces their contribution to the damping torque. Furthermore, placement on the drive frame allows an increase of the number of fingers and their capacity to impart torque. The microscanner exhibits a parametric response, and as such, the maximum deflection is found when actuated at twice its natural frequency. Analytical formulas are given for the coupled-mode equations and frame deflections. A simple formula is derived for the mechanical-gain factor. For a 1-mm x 1.5-mm oblong scanning mirror, a 76. total optical scan angle is achieved at 21.8 kHz with 196-V peak-to-peak excitation voltages. [2009-0304]
  • Placeholder
    PublicationMetadata only
    Electromagnetically actuated FR4 scanners
    (IEEE-Inst Electrical Electronics Engineers Inc, 2008) Yalcinkaya, Arda D.; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; Ürey, Hakan; Holmstrom, Sven; Faculty Member; Researcher; Department of Electrical and Electronics Engineering; College of Engineering; College of Engineering; 8579; N/A
    A torsional micromechanical scanner is fabricated from thin Fire Resistant 4 substrates using standard printed circuit board technology. The top and the bottom copper layers are connected with vias and shaped as a single coil to enable one- and two-dimensional electromagnetic actuation with an external magnet. Using 5 mm x 5 mm mirrors, the following scan angle and resonant frequency combinations are achieved: 17 degrees at 1.8 kHz and 140 degrees at 417 Hz. Another 10 x improvement in magnetic actuation torque seems feasible. The technology offers a unique advantage by allowing a high degree of integration with microoptics and electronics directly on the mechanical platform and offers a low-cost alternative to silicon microelectromechanical systems devices particularly when large or low-frequency devices are required.
  • Placeholder
    PublicationMetadata only
    Mechanically coupled comb drive MEMS stages
    (IEEE, 2008) Hedsten, Karin; Enoksson, Peter; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Arslan, Aslıhan; Ataman, Çağlar; Holmstrom, Sven; Seren, Hüseyin Rahmi; Ürey, Hakan; Researcher; PhD Student; Researcher; Master Student; Faculty Member; Department of Electrical and Electronics Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; N/A; N/A; N/A; 8579
    An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications. 9 pm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
  • Placeholder
    PublicationMetadata only
    MEMS fourier transform spectrometer
    (IEEE, 2011) Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Ürey, Hakan; Ayerden, Nadire Pelin; Holmstrom, Sven; Seren, Hüseyin Rahmi; Faculty Member; Master Student; Researcher; Master Student; Department of Electrical and Electronics Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; 8579; N/A; N/A; N/A
    A comb actuated lamellar grating interferometer based MEMS Fourier Transform Infrared (FTIR) Spectrometer device is designed, fabricated and characterized. The device operates at out-of-plane resonant mode which will allow ultra miniaturized, sensitive, robust, and fast spectrometers. As a novel approach pantograph type springs are used in the mechanical design to achieve high deflections. The dynamic deformation on the gratings is minimized using additional suspension springs. Optical simulations are conducted to extensively analyze the device performance in terms of spectral resolution and signal-to-bias ratio (SBR). In the light of simulations and experiments, the grating geometry is optimized for the region of wavelengths of interest (2.5-16 μm). Comb structures are designed and placed around pantograph springs for low voltage operation. The fabrication process is developed based on CMOS compatible bulk micromachining of a silicon-on-insulator wafer. A maximum peak to peak mechanical deflection of 478 μm is acquired with 50 V p-p input voltage in ambient pressure.
  • Placeholder
    PublicationMetadata only
    Comb- actuated resonant torsional scanner for microdisplays
    (IEEE, 2009) Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Ürey, Hakan; Gökçe, Sertan Kutal; Holmstrom, Sven; Arslan, Aslıhan; Faculty Member; Master Student; Researcher; Master Student; Department of Electrical and Electronics Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; 8579; N/A; N/A; N/A
    A comb-actuated 1D torsional MEMS scanner is developed for high resolution projection display systems using mechanical coupling principle. 64° TOSA (total optical scan angle) is achieved at 22.1 kHz with 170 V peak-to-peak excitation voltages.
  • Placeholder
    PublicationMetadata only
    Resonant PZT MEMS scanner for high-resolution displays
    (IEEE-Inst Electrical Electronics Engineers Inc, 2012) Brown, Dean; Balma, Davide; Davis, Wyatt O.; Muralt, Paul; N/A; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; Baran, Utku; Holmstrom, Sven; Ürey, Hakan; Master Student; Researcher; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; College of Engineering; College of Engineering; N/A; N/A; 8579
    A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at the mechanical resonance frequency of 40 kHz provides an optical scan angle of 38.5 degrees for the 1.4-mm-wide mirror. This scanner is a significant step toward achieving full-high-definition resolution (1920 x 1080 pixels) in mobile laser projectors without the use of vacuum packaging. The reported piezoscanner requires no bulky components and consumes < 30-mW power at maximum deflection, thus providing significant power and size advantages, compared with reported electromagnetic and electrostatic scanners. Interferometry measurements show that the dynamic deformation is at acceptable levels for a large fraction of the mirror and can be improved further for diffraction-limited performance at full resolution. A design variation with a segmented electrode pair illustrated that reliable angle sensing can be achieved with PZT for closed-loop control of the scanner. [2012-0116]
  • Placeholder
    PublicationMetadata only
    MEMS scanners and emerging 3D and interactive Augmented Reality display applications
    (Institute of Electrical and Electronics Engineers (IEEE), 2013) Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; N/A; N/A; N/A; N/A; Ürey, Hakan; Holmstrom, Sven; Baran, Utku; Akşit, Kaan; Hedili, M. Kıvanç; Eldeş, Osman; Faculty Member; Researcher; Master Student; PhD Student; Master Student; Master Student; Department of Electrical and Electronics Engineering; College of Engineering; College of Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; 8579; N/A; N/A; N/A; N/A; N/A
    MEMS scanners have advanced rapidly during the last 20 years thanks to the excellent mechanical and optical properties offered by silicon. They have been used in various display and imaging products. The performance of high resolution and high frequency MEMS laser scanners is close to meeting the demands of full HD displays (120 million pixels per second). Important performance metrics and the performance of various electromagnetic, electrostatic, and piezoelectric actuated MEMS scanners developed in our group are reviewed and recent improvements in the piezoelectric actuated resonant MEMS scanner is presented. Second part of the paper is about some of the emerging 3D and interactive Augmented-Reality display applications enabled by pico-projectors using MEMS scanners. Those technologies are expected to play an important role in the future of human-computer interface.
  • Placeholder
    PublicationMetadata only
    High frequency torsional mems scanner for displays
    (IEEE, 2012) Brown D.; Balma D.; Davis W.O.; Mazzalai A.; Muralt P.; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Ürey, Hakan; Baran, Utku; Holmstrom, Sven; Faculty Member; Master Student; Researcher; Department of Electrical and Electronics Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; 8579; N/A; N/A
    A high frequency resonant torsional microscanner actuated with thin film PZT is modeled, fabricated, and characterized. Sinusoidal actuation with 24 V at a mechanical resonance frequency of 39870 Hz provides a total optical scan angle of 38.5 deg. for the 1.4 mm wide mirror. It provides significant power and size advantages compared to electromagnetically and electrostatically actuated scanners. This scanner is a significant step towards achieving full HD resolution with mobile laser projectors.
  • Placeholder
    PublicationMetadata only
    High-speed broadband FTIR system using MEMS
    (Optical Soc Amer, 2014) Stehle, Jean-Louis; N/A; N/A; Department of Electrical and Electronics Engineering; Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; Ayerden, Nadire Pelin; Aygün, Uğur; Holmstrom, Sven; Ölçer, Selim; Can, Başarbatu; Ürey, Hakan; Master Student; PhD Student; Researcher; Other; Master Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; Graduate School of Sciences and Engineering; College of Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; N/A; N/A; N/A; N/A; N/A; 8579
    Current Fourier transform infrared spectroscopy (FTIR) systems have very good spectral resolution, but are bulky, sensitive to vibrations, and slow. We developed a new FTIR system using a microelectromechanical system (MEMS)-based lamellar grating interferometer that is fast, compact, and achromatic (i.e., does not require a beam splitter). The MEMS device has > 10 mm(2) active surface area, up to +/- 325 mu m mechanical displacement, and a 343 Hz resonant operation frequency. The system uses a 5 MHz bandwidth custom infrared (IR) detector and a small emission area custom blackbody source to achieve fast interferogram acquisition and compact form factor. Effects of lamellar grating period, detector size, laser reference, apodization, and averaging of data on the spectral resolution are discussed. The measurement time ranges from 1.5 to 100 ms depending on the averaging time. In the target range of 2.5-16 mu m (625- 4000 cm(-1)) a spectral resolution of 15-20 cm(-1) is demonstrated. The measurements are shown to be stable over a long time. (C) 2014 Optical Society of America