Researcher:
Davis, Wyatt O.

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Wyatt O.

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Davis

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Davis, Wyatt O.

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20112

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Researcher Of Publications: search.filters.isAuthorOfPublication.f86c56b5-3a74-4f3f-8261-ba805eaff433

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    MEMS rotary stage with linear stiffness
    (IEEE, 2011) Department of Electrical and Electronics Engineering; N/A; Department of Electrical and Electronics Engineering; N/A; N/A; N/A; N/A; Ürey, Hakan; Gökçe, Sertan Kutal; Holmstrom, Sven; Baran, Utku; Sharma, Jaibir; Davis, Wyatt O.; Brown, Dean; Faculty Member; Master Student; Researcher; Master Student; Other; N/A; N/A; Department of Electrical and Electronics Engineering; College of Engineering; Graduate School of Sciences and Engineering; College of Engineering; Graduate School of Sciences and Engineering; N/A; N/A; N/A; 8579; N/A; N/A; N/A; N/A; N/A
    A comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate ±7deg. and ±4.5deg at vacuum and ambient pressure, respectively.
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    PublicationMetadata only
    MEMS rotary stage with linear stiffness
    (Ieee, 2011) N/A; N/A; N/A; Department of Electrical and Electronics Engineering; N/A; N/A; Department of Electrical and Electronics Engineering; Baran, Utku; Davis, Wyatt O.; Holmstrom, Sven; Brown, Dean; Sharma, Jaibir; Gökçe, Sertan Kutal; Ürey, Hakan; Master Student; Other; Researcher; Other; Other; Master Student; Faculty Member; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; N/A; College of Engineering; N/A; N/A; College of Engineering; N/A; N/A; N/A; N/A; N/A; N/A; 8579
    A comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate +/- 7deg. and +/- 4.5deg at vacuum and ambient pressure, respectively.