Publication:
Route to batch-compatible fabrication of nanotweezers by guided self-assembly

Placeholder

Program

KU Authors

Co-Authors

Bøggild, Peter
Tang, P. Torben
Hansen, Ole

Advisor

Publication Date

Language

English

Journal Title

Journal ISSN

Volume Title

Abstract

Fabrication of integrated micro and nanoscale components in a single batch is one of the biggest challenges for nanosystems developement. A self-assembly technique that enables "batch-compatible" integration of micro electro mechanical systems with nanoribbons is presented by demonstrating electrostatically actuated combdrive microgrippers with nanoribbon end-effectors. Preliminary fabrication results demonstrate the possibility of obtaining well defined spatial density and orientation of nanoribbons matching the precision of top-down techniques and at the same time allowing complete alignment and registry with subsequent lithography steps.

Description

Source:

2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings

Publisher:

IEEE

Keywords:

Subject

Mechanical engineering

Citation

Endorsement

Review

Supplemented By

Referenced By

Copy Rights Note

0

Views

0

Downloads

View PlumX Details