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Route to batch-compatible fabrication of nanotweezers by guided self-assembly

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Bøggild, Peter
Tang, P. Torben
Hansen, Ole

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Fabrication of integrated micro and nanoscale components in a single batch is one of the biggest challenges for nanosystems developement. A self-assembly technique that enables "batch-compatible" integration of micro electro mechanical systems with nanoribbons is presented by demonstrating electrostatically actuated combdrive microgrippers with nanoribbon end-effectors. Preliminary fabrication results demonstrate the possibility of obtaining well defined spatial density and orientation of nanoribbons matching the precision of top-down techniques and at the same time allowing complete alignment and registry with subsequent lithography steps.

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IEEE

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Mechanical engineering

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2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings

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10.1109/NANO.2007.4601405

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