Publication: Route to batch-compatible fabrication of nanotweezers by guided self-assembly
Program
KU Authors
Co-Authors
Bøggild, Peter
Tang, P. Torben
Hansen, Ole
Publication Date
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Embargo Status
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Abstract
Fabrication of integrated micro and nanoscale components in a single batch is one of the biggest challenges for nanosystems developement. A self-assembly technique that enables "batch-compatible" integration of micro electro mechanical systems with nanoribbons is presented by demonstrating electrostatically actuated combdrive microgrippers with nanoribbon end-effectors. Preliminary fabrication results demonstrate the possibility of obtaining well defined spatial density and orientation of nanoribbons matching the precision of top-down techniques and at the same time allowing complete alignment and registry with subsequent lithography steps.
Source
Publisher
IEEE
Subject
Mechanical engineering
Citation
Has Part
Source
2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings
Book Series Title
Edition
DOI
10.1109/NANO.2007.4601405