Publication: Route to batch-compatible fabrication of nanotweezers by guided self-assembly
Program
KU Authors
Co-Authors
Bøggild, Peter
Tang, P. Torben
Hansen, Ole
Advisor
Publication Date
Language
English
Journal Title
Journal ISSN
Volume Title
Abstract
Fabrication of integrated micro and nanoscale components in a single batch is one of the biggest challenges for nanosystems developement. A self-assembly technique that enables "batch-compatible" integration of micro electro mechanical systems with nanoribbons is presented by demonstrating electrostatically actuated combdrive microgrippers with nanoribbon end-effectors. Preliminary fabrication results demonstrate the possibility of obtaining well defined spatial density and orientation of nanoribbons matching the precision of top-down techniques and at the same time allowing complete alignment and registry with subsequent lithography steps.
Description
Source:
2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings
Publisher:
IEEE
Keywords:
Subject
Mechanical engineering