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Route to batch-compatible fabrication of nanotweezers by guided self-assembly

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dc.contributor.coauthorBøggild, Peter
dc.contributor.coauthorTang, P. Torben
dc.contributor.coauthorHansen, Ole
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentDepartment of Mechanical Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorAlaca, Burhanettin Erdem
dc.contributor.kuauthorŞardan, Özlem
dc.contributor.kuauthorYalçınkaya, Arda Deniz
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:26:43Z
dc.date.issued2007
dc.description.abstractFabrication of integrated micro and nanoscale components in a single batch is one of the biggest challenges for nanosystems developement. A self-assembly technique that enables "batch-compatible" integration of micro electro mechanical systems with nanoribbons is presented by demonstrating electrostatically actuated combdrive microgrippers with nanoribbon end-effectors. Preliminary fabrication results demonstrate the possibility of obtaining well defined spatial density and orientation of nanoribbons matching the precision of top-down techniques and at the same time allowing complete alignment and registry with subsequent lithography steps.
dc.description.indexedbyScopus
dc.description.indexedbyWOS
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.identifier.doi10.1109/NANO.2007.4601405
dc.identifier.isbn1424-4060-80
dc.identifier.isbn9781-4244-0608-1
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-52949153623
dc.identifier.urihttps://doi.org/10.1109/NANO.2007.4601405
dc.identifier.urihttps://hdl.handle.net/20.500.14288/11579
dc.identifier.wos261434900278
dc.keywordsNanowires
dc.keywordsSelf-assembly Electrostatic actuators
dc.keywordsLithography
dc.keywordsNanosystems
dc.keywordsOptical design
dc.keywordsSelf assembly
dc.keywordsTechnology
dc.keywordsComb drives
dc.keywordsEnd-effectors
dc.keywordsGuided self-assembly
dc.keywordsInternational conferences
dc.keywordsMEMS/NEMS
dc.keywordsMicro-electro mechanical systems
dc.keywordsMicro-grippers
dc.keywordsMicro-nano integration
dc.keywordsNano scaling
dc.keywordsNano tweezers
dc.keywordsNanoribbon
dc.keywordsNanoribbons
dc.keywordsSelf-assembly techniques
dc.keywordsSpatial densities
dc.keywordsTop-down
dc.keywordsNanotechnology
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartof2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings
dc.subjectMechanical engineering
dc.titleRoute to batch-compatible fabrication of nanotweezers by guided self-assembly
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorŞardan, Özlem
local.contributor.kuauthorAlaca, Burhanettin Erdem
local.contributor.kuauthorYalçınkaya, Arda Deniz
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Mechanical Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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