Publication: Resonant MOEMS scanner design and dynamics
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In scanning systems, the speed of scanning, scanner resolution, and power requirements can be substantially reduced by using high-Q resonant scanners. We discuss the scanner features and dynamic modeling of resonant scanners for display and imaging applications.
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IEEE
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2002 IEEE/Leos International Conference On Optical Mems, Conference Digest
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Scholar'da Ara ↗5
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