Publication: Resonant MOEMS scanner design and dynamics
Program
KU-Authors
KU Authors
Co-Authors
Advisor
Publication Date
Language
English
Journal Title
Journal ISSN
Volume Title
Abstract
In scanning systems, the speed of scanning, scanner resolution, and power requirements can be substantially reduced by using high-Q resonant scanners. We discuss the scanner features and dynamic modeling of resonant scanners for display and imaging applications.
Source:
2002 IEEE/Leos International Conference On Optical Mems, Conference Digest
Publisher:
IEEE
Keywords:
Subject
Electrical electronics engineering, Optics