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Resonant MOEMS scanner design and dynamics

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuprofileFaculty Member
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.yokid8579
dc.date.accessioned2024-11-09T23:22:57Z
dc.date.issued2002
dc.description.abstractIn scanning systems, the speed of scanning, scanner resolution, and power requirements can be substantially reduced by using high-Q resonant scanners. We discuss the scanner features and dynamic modeling of resonant scanners for display and imaging applications.
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.identifier.doiN/A
dc.identifier.isbn0-7803-7595-5
dc.identifier.scopus2-s2.0-84963722518
dc.identifier.urihttps://hdl.handle.net/20.500.14288/11161
dc.identifier.wos178015700040
dc.keywordsPerformance
dc.languageEnglish
dc.publisherIEEE
dc.source2002 IEEE/Leos International Conference On Optical Mems, Conference Digest
dc.subjectElectrical electronics engineering
dc.subjectOptics
dc.titleResonant MOEMS scanner design and dynamics
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-2031-7967
local.contributor.kuauthorÜrey, Hakan
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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