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Hydrogen and humidity sensing based on WGMs of elastic polymer optical microresonators

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dc.contributor.departmentDepartment of Physics
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorAnand, Suman
dc.contributor.kuauthorEryürek, Mustafa
dc.contributor.kuauthorKiraz, Alper
dc.contributor.schoolcollegeinstituteCollege of Sciences
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T22:45:46Z
dc.date.issued2015
dc.description.abstractWe report hydrogen and humidity sensor employing elastic polymer (SU-8) optical microresonators. The sensing mechanism relies on the optical whispering gallery mode (WGM) resonance shifts in the transmission spectra of these microresonators. WGMs are excited through SU-8 waveguides in which a tunable laser light is coupled from an optical fiber. Relative humidity between 0 and 65% is detected at room temperature. For hydrogen sensing, the microresonators are coated with a thin layer of palladium (Pd) metal layer to increase the sensing performance. Hydrogen gas is detected reversibly between 0.3 and 1.5%. Hydrogen gas concentrations higher than 1.5% result irreversible degradation of the devices because of a phase transition occurring in the Pd layer.
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipBrno University of Technology, Faculty of Electrical Engineering and Communication, Department of Theoretical and Experimental Electrical Engineering
dc.description.sponsorshipBrno University of Technology, SIX - Research Centre of Sensor, Information and Communication System
dc.description.sponsorshipCzech Technical University in Prague, Faculty of Biomedical Engineering (FBME), Department of Biomedical Technique
dc.description.sponsorshipCzech Technical University in Prague, Faculty of Electrical Engineering (FEE), Department of EM Field
dc.description.sponsorshipEMBS Chapter of the IEEE Czechoslovakia Section
dc.description.sponsorshipet al.
dc.description.volume2015-January
dc.identifier.isbn9781-9341-4230-1
dc.identifier.issn1559-9450
dc.identifier.linkhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84947296790&partnerID=40&md5=d7316fe27d59f4ed5902aaa04240be02
dc.identifier.scopus2-s2.0-84947296790
dc.identifier.urihttps://hdl.handle.net/20.500.14288/6154
dc.keywordsHumidity sensors
dc.keywordsHydrogen
dc.keywordsOptical fibers
dc.keywordsOptical resonators
dc.keywordsResonators
dc.keywordsWhispering gallery modes
dc.language.isoeng
dc.publisherElectromagnetics Academy
dc.relation.ispartofProgress in Electromagnetics Research Symposium
dc.subjectPhysics
dc.titleHydrogen and humidity sensing based on WGMs of elastic polymer optical microresonators
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorEryürek, Mustafa
local.contributor.kuauthorAnand, Suman
local.contributor.kuauthorKiraz, Alper
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Sciences
local.publication.orgunit2Department of Physics
local.publication.orgunit2Graduate School of Sciences and Engineering
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