Publication:
Silk as a biodegradable resist for field-emission scanning probe lithography

dc.contributor.coauthorSadeghi, Sadra
dc.contributor.coauthorRangelow, Ivo W.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentDepartment of Mechanical Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.departmentKUYTAM (Koç University Surface Science and Technology Center)
dc.contributor.kuauthorAlaca, Burhanettin Erdem
dc.contributor.kuauthorDoğru-Yüksel, Itır Bakış
dc.contributor.kuauthorKumar, Baskaran Ganesh
dc.contributor.kuauthorMelikov, Rustamzhon
dc.contributor.kuauthorNizamoğlu, Sedat
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.contributor.schoolcollegeinstituteResearch Center
dc.date.accessioned2024-11-10T00:12:07Z
dc.date.issued2020
dc.description.abstractThe patterning of silk allows for manufacturing various structures with advanced functionalities for optical and tissue engineering and drug delivery applications. Here, we propose a high-resolution nanoscale patterning method based on field-emission scanning probe lithography (FE-SPL) that crosslinks the biomaterial silk on conductive indium tin oxide (ITO) promoting the use of a biodegradable material as resist and water as a developer. During the lithographic process, Fowler-Nordheim electron emission from a sharp tip was used to manipulate the structure of silk fibroin from random coil to beta sheet and the emission formed nanoscale latent patterns with a critical dimension (CD) of similar to 50 nm. To demonstrate the versatility of the method, we patterned standard and complex shapes. This method is particularly attractive due to its ease of operation without relying on a vacuum or a special gaseous environment and without any need for complex electronics or optics. Therefore, this study paves a practical and cost-effective way toward patterning biopolymers at ultra-high level resolution.
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.indexedbyPubMed
dc.description.issue43
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipTurkish Academy of Sciences (TUBA-GEBIP)
dc.description.sponsorshipScience Academy of Turkey (BAGEP) The authors thank Koc University Surface Science and Technology Center for FTIR analysis. S.N. acknowledges the support by the Turkish Academy of Sciences (TUBA-GEBIP
dc.description.sponsorshipThe Young Scientist Award Program) and the Science Academy of Turkey (BAGEP
dc.description.sponsorshipThe Young Scientist Award Program).
dc.description.volume31
dc.identifier.doi10.1088/1361-6528/ab99f5
dc.identifier.eissn1361-6528
dc.identifier.issn0957-4484
dc.identifier.quartileQ2
dc.identifier.scopus2-s2.0-85089406529
dc.identifier.urihttps://doi.org/10.1088/1361-6528/ab99f5
dc.identifier.urihttps://hdl.handle.net/20.500.14288/17587
dc.identifier.wos561523600001
dc.keywordsSilk
dc.keywordsField-emission scanning probe lithography
dc.keywordsResist
dc.keywordsNano patterning
dc.keywordsAFM nanolithography
dc.keywordsManipulation
dc.keywordsFabrication
dc.keywordsArrays
dc.language.isoeng
dc.publisherInstitute of Physics (IOP) Publishing
dc.relation.ispartofNanotechnology
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectMaterials science
dc.subjectPhysics
dc.subjectApplied physics
dc.titleSilk as a biodegradable resist for field-emission scanning probe lithography
dc.typeJournal Article
dspace.entity.typePublication
local.contributor.kuauthorAlaca, Burhanettin Erdem
local.contributor.kuauthorKumar, Baskaran Ganesh
local.contributor.kuauthorMelikov, Rustamzhon
local.contributor.kuauthorDoğru-Yüksel, Itır Bakış
local.contributor.kuauthorNizamoğlu, Sedat
local.publication.orgunit1College of Engineering
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1Research Center
local.publication.orgunit2Department of Mechanical Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2KUYTAM (Koç University Surface Science and Technology Center)
local.publication.orgunit2Graduate School of Sciences and Engineering
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