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Thermo-mechanical detector array with optical readout

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorFerhanoğlu, Onur
dc.contributor.kuauthorTorun, Hamdi
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:29:46Z
dc.date.issued2006
dc.description.abstractAn uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures that bend in response to thermal change. A diffraction grating placed underneath each pixel allows sensing sub-nm mechanical deflections.
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.identifier.doi10.1109/omems.2006.1708290
dc.identifier.isbn0780-3956-2X
dc.identifier.isbn9780-7803-9562-6
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-41549101698
dc.identifier.urihttps://www.scopus.com/inward/record.uri?eid=2-s2.0-41549101698&doi=10.1109%2fomems.2006.1708290&partnerID=40&md5=51e6d15b12b5b8a3005f4d78c440f1e8
dc.identifier.urihttps://hdl.handle.net/20.500.14288/12117
dc.keywordsMEMS
dc.keywordsOptical systems
dc.keywordsPixels
dc.keywordsThermomechanical treatment
dc.keywordsMEMS bimaterial structures
dc.keywordsThermo-mechanical detector array
dc.keywordsTemperature control
dc.language.isoeng
dc.publisherIEEE-Inst Electrical Electronics Engineers Inc
dc.relation.ispartofIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
dc.subjectElectrical electronics engineering
dc.titleThermo-mechanical detector array with optical readout
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorTorun, Hamdi
local.contributor.kuauthorFerhanoğlu, Onur
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
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