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Thermo-mechanical detector array with optical readout

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.facultymemberYes
dc.contributor.kuauthorFerhanoğlu, Onur
dc.contributor.kuauthorTorun, Hamdi
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T23:29:46Z
dc.date.issued2006
dc.description.abstractAn uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures that bend in response to thermal change. A diffraction grating placed underneath each pixel allows sensing sub-nm mechanical deflections.
dc.description.fulltextNo
dc.description.harvestedfromManual
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.peerreviewstatusN/A
dc.description.publisherscopeInternational
dc.description.readpublishN/A
dc.description.sponsoredbyTubitakEuN/A
dc.description.studentonlypublicationNo
dc.description.studentpublicationYes
dc.description.versionN/A
dc.identifier.WoSQuartileN/A
dc.identifier.doi10.1109/omems.2006.1708290
dc.identifier.embargoN/A
dc.identifier.endpage113
dc.identifier.isbn078039562X
dc.identifier.isbn9780780395626
dc.identifier.scopus2-s2.0-41549101698
dc.identifier.startpage112
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2006.1708290
dc.identifier.urihttps://hdl.handle.net/20.500.14288/12117
dc.keywordsMEMS
dc.keywordsOptical systems
dc.keywordsPixels
dc.keywordsThermomechanical treatment
dc.keywordsMEMS bimaterial structures
dc.keywordsThermo-mechanical detector array
dc.keywordsTemperature control
dc.language.isoeng
dc.publisherIEEE-Inst Electrical Electronics Engineers Inc
dc.relation.affiliationKoç University
dc.relation.collectionKoç University Institutional Repository
dc.relation.conferenceIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference
dc.relation.ispartofIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
dc.relation.openaccessN/A
dc.rightsN/A
dc.subjectElectrical electronics engineering
dc.titleThermo-mechanical detector array with optical readout
dc.typeConference Proceeding
dspace.entity.typePublication
local.conference.date21 August 2006 - 24 August 2006
local.contributor.kuauthorTorun, Hamdi
local.contributor.kuauthorFerhanoğlu, Onur
local.contributor.kuauthorÜrey, Hakan
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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