Publication: Thermo-mechanical detector array with optical readout
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Abstract
An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures that bend in response to thermal change. A diffraction grating placed underneath each pixel allows sensing sub-nm mechanical deflections.
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IEEE-Inst Electrical Electronics Engineers Inc
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IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
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10.1109/omems.2006.1708290
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