Publication:
Dynamic modeling of magnetic film actuators

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Publication Date

2007

Language

English

Type

Conference proceeding

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Abstract

Dynamic behavior of magnetic film based actuators is modeled and the model is validated with experiments. An external electro-coil is used to actuate the cantilever scanners, which has an electroplated 30 mum thick permalloy layer. Resonant vibration of the actuator is modeled accurately without constraining the external field to be uniform or the ferromagnetic material to be saturated.

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Source:

2007 IEEE Leos Annual Meeting Conference Proceedings, Vols 1 and 2

Publisher:

IEEE

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Subject

Engineering, Electrical and electronic engineering, Nanoscience, Nanotechnology, Optics

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