Publication: Dynamic modeling of magnetic film actuators
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KU-Authors
KU Authors
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N/A
Publication Date
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Journal Title
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Volume Title
Alternative Title
Abstract
Dynamic behavior of magnetic film based actuators is modeled and the model is validated with experiments. An external electro-coil is used to actuate the cantilever scanners, which has an electroplated 30 mum thick permalloy layer. Resonant vibration of the actuator is modeled accurately without constraining the external field to be uniform or the ferromagnetic material to be saturated.
Source
Publisher
IEEE
Subject
Engineering, Electrical and electronic engineering, Nanoscience, Nanotechnology, Optics
Citation
Has Part
Source
2007 IEEE Leos Annual Meeting Conference Proceedings, Vols 1 and 2
Book Series Title
Edition
DOI
10.1109/LEOS.2007.4382706