Publication: Dynamic modeling of magnetic film actuators
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Abstract
Dynamic behavior of magnetic film based actuators is modeled and the model is validated with experiments. An external electro-coil is used to actuate the cantilever scanners, which has an electroplated 30 mum thick permalloy layer. Resonant vibration of the actuator is modeled accurately without constraining the external field to be uniform or the ferromagnetic material to be saturated.
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Institute of Electrical and Electronics Engineers
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IEEE Lasers and Electro-Optics Society (LEOS) Annual Meeting
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10.1109/LEOS.2007.4382706
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