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Non-resonant and resonant 2D quasi-static PZT MEMS scanners for LiDAR applications

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentOptical Microsystems Laboratory (MEMS)
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuauthorZolfaghari, Parviz
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.contributor.schoolcollegeinstituteLaboratory
dc.date.accessioned2025-03-06T20:57:14Z
dc.date.issued2024
dc.description.abstractThis study presents the design and simulation of four high-performing two-dimensional quasi-static MEMS laser scanners, employing both non-resonant and resonant PZT actuation mechanisms with mechanical coupling. The simulations demonstrate the achievement of optical scanning angles of up to 63.76 degrees for the non-resonant mode and 231.96 degrees for the resonant mode. Additionally, the optical scanning bandwidth-efficiency product (theta(opt).D.f) is calculated as 66.68 deg.mme.Hz for the non-resonant mode and 5741.24 deg.mme.Hz for the resonant mode, establishing these devices as the highest-performing 2D MEMS scanners reported in the literature.
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuTÜBİTAK
dc.description.sponsorshipThis study has been supported by TÜBİTAK 2247 program (support agreement number 120C145). The authors acknowledge resources and support from N2STAR cleanroom core facilities at Koc University.
dc.identifier.doi10.1109/OMN61224.2024.10685226
dc.identifier.grantnoTÜBİTAK 2247 program [120C145]
dc.identifier.isbn9798350384925
dc.identifier.issn2160-5033
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-85206133901
dc.identifier.urihttps://doi.org/10.1109/OMN61224.2024.10685226
dc.identifier.urihttps://hdl.handle.net/20.500.14288/27161
dc.identifier.wos1327768000007
dc.keywordsMicromechanical devices
dc.keywordsOptical sensors
dc.keywordsMechanical sensors
dc.keywordsMirrors
dc.keywordsResonant frequency
dc.keywords2D scanner
dc.keywordsLiDAR
dc.keywordsNon-resonant scanner
dc.keywordsMEMS
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartof2024 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, OMN
dc.subjectEngineering
dc.subjectElectrical and electronic
dc.subjectNanoscience
dc.subjectOptics
dc.titleNon-resonant and resonant 2D quasi-static PZT MEMS scanners for LiDAR applications
dc.typeConference Proceeding
dspace.entity.typePublication
local.publication.orgunit1College of Engineering
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1Laboratory
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Optical Microsystems Laboratory (MEMS)
local.publication.orgunit2Graduate School of Sciences and Engineering
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication1ccc49b6-9307-426d-a69c-e129234ffef8
relation.isOrgUnitOfPublication3fc31c89-e803-4eb1-af6b-6258bc42c3d8
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication434c9663-2b11-4e66-9399-c863e2ebae43
relation.isParentOrgUnitOfPublication20385dee-35e7-484b-8da6-ddcc08271d96
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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