Application of a design methodology using a 2D micro scanner

Abstract

Predicting the performance of Micro Electro Mechanical Systems (MEMS) early in the design phase can impact the design cost and also improve the quality of the design. This paper presents a methodology which aims to predict the performance of such systems under various disturbance sources and develop a generalized design approach for micro structures. A two-dimensional torsional micro scanner mirror was chosen as the case study to demonstrate the developed methodologies. The finite element model (FEM) of the micro mirror was built using ANSYS software. An experimental vibration testing system was built to validate, update, and correct the finite element model. Validated finite element model was used to obtain the state space representation of the mirror. The state space model was used for disturbance analysis which was performed using Lyapunov approach to obtain root-mean-square (RMS) values of the mirror rotation angle under the effect of a disturbance torque. The disturbance analysis framework was combined with the sensitivity analysis to determine the critical design parameters for improving the system performance.