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State feedback control for adjusting the dynamic behavior of a piezoactuated bimorph atomic force microscopy probe

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dc.contributor.coauthorGüvenç, Levent
dc.contributor.departmentDepartment of Mechanical Engineering
dc.contributor.kuauthorÖrün, Bilal
dc.contributor.kuauthorNecipoğlu, Serkan
dc.contributor.kuauthorBaşdoğan, Çağatay
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileFaculty Member
dc.contributor.otherDepartment of Mechanical Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokid125489
dc.date.accessioned2024-11-09T12:28:47Z
dc.date.issued2009
dc.description.abstractWe adjust the transient dynamics of a piezoactuated bimorph atomic force microscopy (AFM) probe using a state feedback controller. This approach enables us to adjust the quality factor and the resonance frequency of the probe simultaneously. First, we first investigate the effect of feedback gains on dynamic response of the probe and then show that the time constant of the probe can be reduced by reducing its quality factor and/or increasing its resonance frequency to reduce the scan error in tapping mode AFM.
dc.description.fulltextYES
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.indexedbyPubMed
dc.description.issue6
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipN/A
dc.description.versionPublisher version
dc.description.volume80
dc.formatpdf
dc.identifier.doi10.1063/1.3142484
dc.identifier.eissn1089-7623
dc.identifier.embargoNO
dc.identifier.filenameinventorynoIR00881
dc.identifier.issn0034-6748
dc.identifier.linkhttps://doi.org/10.1063/1.3142484
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-67650333644
dc.identifier.urihttps://hdl.handle.net/20.500.14288/1825
dc.identifier.wos267600600018
dc.keywordsAtomic force microscopy
dc.keywordsQ-factor
dc.languageEnglish
dc.publisherAmerican Institute of Physics (AIP) Publishing
dc.relation.urihttp://cdm21054.contentdm.oclc.org/cdm/ref/collection/IR/id/888
dc.sourceReview of Scientific Instruments
dc.subjectApplied physics
dc.titleState feedback control for adjusting the dynamic behavior of a piezoactuated bimorph atomic force microscopy probe
dc.typeJournal Article
dspace.entity.typePublication
local.contributor.authoridN/A
local.contributor.authoridN/A
local.contributor.authorid0000-0002-6382-7334
local.contributor.kuauthorÖrün, Bilal
local.contributor.kuauthorNecipoğlu, Serkan
local.contributor.kuauthorBaşdoğan, Çağatay
relation.isOrgUnitOfPublicationba2836f3-206d-4724-918c-f598f0086a36
relation.isOrgUnitOfPublication.latestForDiscoveryba2836f3-206d-4724-918c-f598f0086a36

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