Optical scanners for high resolution RSD systems

Abstract

This paper outlines the design trade-offs and measured results of scanner architectures for use in high resolution Retinal Scanning Displays: Mechanical resonant for horizontal scanning, and MEMS-based pinch correction and vertical linear scanners. Analysis steps and techniques used to model and minimize dynamic deformations are covered. This paper also discusses two types of scanners and associated mirror flatness issues. Dynamic flatness modeling and performance results are presented, followed by thermally induced deformations and possible athermalize solutions for MEMS-type scanning mirrors. Theory, FEA dynamic and thermal analysis, experimental results, and methods to reduce mirror deformation are discussed.