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NiFe plated biaxial MEMS scanner for 2-D imaging

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dc.contributor.coauthorYalcinkaya, Arda D.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T23:21:41Z
dc.date.issued2007
dc.description.abstractA two-axis microelectromechanical systems micromirror actuator is developed for retinal scanning display and imaging applications. The device operation makes use of magnetostatic torque produced by the combination of a flux generating custom-made high-frequency electrocoil and the NiFe layer deposited on the movable part. Modeling of the actuation in the magnetic domain, as well as the experimental characterization of the mechanical part is described. The device is capable of full optical scan angles of 88 degrees (at 100-mA root-mean-square coil current) and 1.8 degrees for slow and fast-scan directions, respectively. In combination with a mirror size of 1.5 mm, resulting theta(opt) . D products are 132 degrees. mm and 2.7 degrees. mm for slow and fast axis, respectively. Atmospheric operation of the device is enabled due to high mechanical quality factors of the order of 3000.
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.issue45143
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.volume19
dc.identifier.doi10.1109/LPT.2007.891592
dc.identifier.eissn1941-0174
dc.identifier.issn1041-1135
dc.identifier.scopus2-s2.0-33947694373
dc.identifier.urihttps://doi.org/10.1109/LPT.2007.891592
dc.identifier.urihttps://hdl.handle.net/20.500.14288/10936
dc.identifier.wos245768200026
dc.keywordsDisplays
dc.keywordsElectromagnetic actuator
dc.keywordsMicroelectromechanical systems (MEMS)
dc.keywordsMicrosystems
dc.keywordsMicrotechnology
dc.language.isoeng
dc.publisherIEEE-Inst Electrical Electronics Engineers Inc
dc.relation.ispartofIEEE Photonics Technology Letters
dc.subjectElectrical electronics engineering
dc.subjectOptics
dc.subjectPhysics
dc.titleNiFe plated biaxial MEMS scanner for 2-D imaging
dc.typeJournal Article
dspace.entity.typePublication
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorHolmstrom, Sven
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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