Publication:
Determination of the elastic behavior of silicon nanowires within a scanning electron microscope

dc.contributor.coauthorWollschloeger, Nicole
dc.contributor.coauthorHaeusler, Ines
dc.contributor.coauthorLeblebici, Yusuf
dc.contributor.coauthorOesterle, Werner
dc.contributor.departmentDepartment of Mechanical Engineering
dc.contributor.kuauthorAlaca, Burhanettin Erdem
dc.contributor.kuauthorTaşdemir, Zuhal
dc.contributor.kuprofileFaculty Member
dc.contributor.otherDepartment of Mechanical Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.yokid115108
dc.contributor.yokidN/A
dc.date.accessioned2024-11-09T11:45:11Z
dc.date.issued2016
dc.description.abstractThree-point bending tests were performed on double-anchored, < 110 > silicon nanowire samples in the vacuum chamber of a scanning electron microscope ( SEM) via a micromanipulator equipped with a piezoresistive force sensor. Nanowires with widths of 35nm and 74 nm and a height of 168nm were fabricated. The nanowires were obtained monolithically along with their 10 mu m tall supports through a top-down fabrication approach involving a series of etching processes. The exact dimension of wire cross sections was determined by transmission electron microscopy ( TEM). Conducting the experiments in an SEM chamber further raised the opportunity of the direct observation of any deviation from ideal loading conditions such as twisting, which could then be taken into consideration in simulations. Measured force-displacement behavior was observed to exhibit close resemblance to simulation results obtained by finite element modeling, when the bulk value of 169gpa was taken as the modulus of elasticity for < 110 > silicon. Hence, test results neither show any size effect nor show evidence of residual stresses for the considered nanoscale objects. The increased effect of the native oxide with reduced nanowire dimensions was captured as well. The results demonstrate the potential of the developed nanowire fabrication approach for the incorporation in functional micromechanical devices.
dc.description.fulltextYES
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuTÜBİTAK
dc.description.sponsoredbyTubitakEuEU
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TÜBİTAK)
dc.description.sponsorshipEuropean Union
dc.description.sponsorshipEMRP Participating Countries Within EURAMET
dc.description.sponsorshipKoç University-Istanbul Rotary Club Fundamental Research Seed Fund Program
dc.description.versionPublisher version
dc.description.volume2016
dc.formatpdf
dc.identifier.doi10.1155/2016/4905838
dc.identifier.eissn1687-4129
dc.identifier.embargoNO
dc.identifier.filenameinventorynoIR00438
dc.identifier.issn1687-4110
dc.identifier.linkhttps://doi.org/10.1155/2016/4905838
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-84985986757
dc.identifier.urihttps://hdl.handle.net/20.500.14288/457
dc.identifier.wos381457700001
dc.keywordsBending tests
dc.keywordsFabrication
dc.keywordsHigh resolution transmission electron microscopy
dc.keywordsNanowires
dc.keywordsScanning electron microscopy
dc.keywordsSilicon
dc.keywordsTransmission electron microscopy
dc.keywordsDirect observations
dc.keywordsForce-displacement behavior
dc.keywordsLoading condition
dc.keywordsMicromechanical device
dc.keywordsNano-scale objects
dc.keywordsPiezoresistive force sensors
dc.keywordsThree-point bending test
dc.keywordsTop-down fabrication
dc.keywordsFinite element method
dc.languageEnglish
dc.publisherHindawi
dc.relation.grantno1.12E+60
dc.relation.urihttp://cdm21054.contentdm.oclc.org/cdm/ref/collection/IR/id/451
dc.sourceJournal of Nanomaterials
dc.subjectNanoscience and nanotechnology
dc.subjectScience and technology
dc.titleDetermination of the elastic behavior of silicon nanowires within a scanning electron microscope
dc.typeJournal Article
dspace.entity.typePublication
local.contributor.authorid0000-0001-5931-8134
local.contributor.authoridN/A
local.contributor.kuauthorAlaca, Burhanettin Erdem
local.contributor.kuauthorTaşdemir, Zuhal
relation.isOrgUnitOfPublicationba2836f3-206d-4724-918c-f598f0086a36
relation.isOrgUnitOfPublication.latestForDiscoveryba2836f3-206d-4724-918c-f598f0086a36

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