Optofluidic three-dimensional microfabrication and nanofabrication

Abstract

Three-dimensional (3D) microfabrication/nanofabrication technologies have revolutionized various fields by enabling the precise construction of complex microstructures/nanostructures1, 2, 3, 4, 5-6. However, existing methods face challenges in fabricating intricate 3D architectures from a diverse range of materials beyond conventional polymers. Here we introduce a universal 3D microfabrication/nanofabrication strategy compatible with a broad range of materials by precisely manipulating optofluidic interactions within a confined 3D space, enabling the creation of volumetric, free-form 3D microstructures/nanostructures. A femtosecond-laser-induced heating spot generates a localized thermal gradient, providing precise spatiotemporal control over optofluidic interactions of the nanoparticle-laden dispersions. This enables the rapid and highly localized assembly of nanoparticles with diverse shapes and compositions-including metals, metal oxides, carbon nanomaterials and quantum dots-into complex 3D microstructures. To demonstrate its versatility, we fabricate multifunctional microdevices, such as 3D microfluidic valves with size-selective sieving functionality, achieving fast separation of microparticles/nanoparticles with distinct dimensions, as well as microrobots integrated with four distinct functional materials, achieving multimodal locomotion powered by different external stimuli. This optofluidic 3D microfabrication/nanofabrication method unlocks new opportunities for advanced material innovation and miniaturized device development, paving the way for broad applications in colloidal robotics7, microphotonics/nanophotonics, catalysis and microfluidics.