Publication:
Microfabricated tools for pick-and-place of nanoscale components

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dc.contributor.coauthorBøggild, Peter
dc.contributor.coauthorPetersen, Dirch Hjorth
dc.contributor.coauthorKjelstrup-Hansen, Jakob
dc.contributor.coauthorMølhave, Kristian
dc.contributor.coauthorAndersen, Karin Nordstrøm
dc.contributor.departmentDepartment of Mechanical Engineering
dc.contributor.facultymemberNo
dc.contributor.kuauthorŞardan, Özlem
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T23:36:09Z
dc.date.issued2006
dc.description.abstractWe present a high-aspect ratio three-beam electro-thermally actuated gripper made from single-crystalline, highly doped silicon, and compare the performance to a five-electrode electrostatic gripper in terms of actuation and manipulation capabilities. The electrothermal gripper can be configured in a number of different ways, which leads to a high degree of adaptability to various manipulation scenarios. Finally, we consider different options for customising the gripper microcantilevers by add-on nanotips.
dc.description.indexedbyScopus
dc.description.issuePART 1
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.studentonlypublicationYes
dc.description.studentpublicationYes
dc.description.volume4
dc.identifier.WoSQuartileN/A
dc.identifier.doi10.3182/20060912-3-de-2911.00024
dc.identifier.isbn9783902661173
dc.identifier.issn1474-6670
dc.identifier.scopus2-s2.0-70449622876
dc.identifier.urihttps://doi.org/10.3182/20060912-3-DE-2911.00024
dc.identifier.urihttps://hdl.handle.net/20.500.14288/12604
dc.keywordsElectron microscopy
dc.keywordsNanomanipulation
dc.keywordsRobotic manipulators Aspect ratio
dc.keywordsGrippers
dc.keywordsNanotechnology
dc.keywordsElectrostatic Grippers
dc.keywordsHigh aspect ratio
dc.keywordsMicro-cantilevers
dc.keywordsMicrofabricated
dc.keywordsPick and place
dc.keywordsSingle-crystalline
dc.keywordsManipulators
dc.language.isoeng
dc.publisherElsevier
dc.relation.ispartofIFAC Proceedings Volumes (IFAC-Papersonline)
dc.subjectEngineering
dc.titleMicrofabricated tools for pick-and-place of nanoscale components
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorŞardan, Özlem
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relation.isOrgUnitOfPublication.latestForDiscoveryba2836f3-206d-4724-918c-f598f0086a36
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relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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