Publication:
Microfabricated tools for pick-and-place of nanoscale components

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dc.contributor.coauthorBøggild, Peter
dc.contributor.coauthorPetersen, Dirch Hjorth
dc.contributor.coauthorKjelstrup-Hansen, Jakob
dc.contributor.coauthorMølhave, Kristian
dc.contributor.coauthorAndersen, Karin Nordstrøm
dc.contributor.kuauthorŞardan, Özlem
dc.contributor.kuprofileMaster Student
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.yokidN/A
dc.date.accessioned2024-11-09T23:36:09Z
dc.date.issued2006
dc.description.abstractWe present a high-aspect ratio three-beam electro-thermally actuated gripper made from single-crystalline, highly doped silicon, and compare the performance to a five-electrode electrostatic gripper in terms of actuation and manipulation capabilities. The electrothermal gripper can be configured in a number of different ways, which leads to a high degree of adaptability to various manipulation scenarios. Finally, we consider different options for customising the gripper microcantilevers by add-on nanotips.
dc.description.indexedbyScopus
dc.description.issuePART 1
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.volume4
dc.identifier.doi10.3182/20060912-3-de-2911.00024
dc.identifier.isbn9783-9026-6117-3
dc.identifier.issn1474-6670
dc.identifier.linkhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-70449622876&doi=10.3182%2f20060912-3-de-2911.00024&partnerID=40&md5=06548a605a05faffae778d3e30efae12
dc.identifier.quartileQ3
dc.identifier.scopus2-s2.0-70449622876
dc.identifier.urihttps://www.scopus.com/inward/record.uri?eid=2-s2.0-70449622876&doi=10.3182%2f20060912-3-de-2911.00024&partnerID=40&md5=06548a605a05faffae778d3e30efae12
dc.identifier.urihttps://hdl.handle.net/20.500.14288/12604
dc.keywordsElectron microscopy
dc.keywordsNanomanipulation
dc.keywordsRobotic manipulators Aspect ratio
dc.keywordsGrippers
dc.keywordsNanotechnology
dc.keywordsElectrostatic Grippers
dc.keywordsHigh aspect ratio
dc.keywordsMicro-cantilevers
dc.keywordsMicrofabricated
dc.keywordsPick and place
dc.keywordsSingle-crystalline
dc.keywordsManipulators
dc.languageEnglish
dc.publisherElsevier
dc.sourceIFAC Proceedings Volumes (IFAC-Papersonline)
dc.subjectEngineering
dc.titleMicrofabricated tools for pick-and-place of nanoscale components
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authoridN/A
local.contributor.kuauthorŞardan, Özlem

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