Publication: Fabrication of junctionless silicon nanowire transistors via mix and watch pattering based on field emission scanning probe lithography
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Program
Mechanical Engineering
KU-Authors
KU Authors
Co-Authors
Authors
Özden, Mert
Advisor
Alaca, Burhanettin Erdem
Publication Date
2022
Language
English
Type
Thesis
Journal Title
Journal ISSN
Volume Title
Abstract
Description
xviii, 66 leaves : illustrations ; 30 cm.
Source:
Publisher:
Koç University
Keywords:
Subject
Nanowires, Silicon, Transistors, Nanostructured materials, Nanoelectromechanical systems, Nanoelectronics, Microelectronics, Microelectromechanical systems, Nanotechnology