Publication:
Fabrication of junctionless silicon nanowire transistors via mix and watch pattering based on field emission scanning probe lithography

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dc.contributor.advisorAlaca, Burhanettin Erdem
dc.contributor.advisorid0000-0001-5931-8134
dc.contributor.authorÖzden, Mert
dc.contributor.instituteKoç University Graduate School of Sciences and Engineering
dc.contributor.programMechanical Engineering
dc.contributor.yokid115108
dc.date.accessioned2024-11-09T21:57:54Z
dc.date.issued2022
dc.descriptionxviii, 66 leaves : illustrations ; 30 cm.
dc.identifier.urihttps://hdl.handle.net/20.500.14288/4524
dc.languageEnglish
dc.publisherKoç University
dc.relation.collectionKU Theses and Dissertations
dc.rightsrestrictedAccess
dc.rights.copyrightsnote© All Rights Reserved. Accessible to Koç University Affiliated Users Only!
dc.subjectNanowires
dc.subjectSilicon
dc.subjectTransistors
dc.subjectNanostructured materials
dc.subjectNanoelectromechanical systems
dc.subjectNanoelectronics
dc.subjectMicroelectronics
dc.subjectMicroelectromechanical systems
dc.subjectNanotechnology
dc.thesis.degreeMaster's Degree
dc.thesis.grantorİstanbul
dc.titleFabrication of junctionless silicon nanowire transistors via mix and watch pattering based on field emission scanning probe lithography
dc.typeThesis
dspace.entity.typePublication
relation.isAdvisorOfThesise6cb6850-fab7-4d8f-9256-378526b43c99
relation.isAdvisorOfThesis.latestForDiscoverye6cb6850-fab7-4d8f-9256-378526b43c99

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