Effect of geometry in frequency response modeling of nanomechanical resonators

Abstract

The trend towards nanomechanical resonator sensors with increasing sensitivity raises the need to address challenges encountered in the modeling of their mechanical behavior. Selecting the best approach in mechanical response modeling amongst the various potential computational solid mechanics methods is subject to controversy. A guideline for the selection of the appropriate approach for a specific set of geometry and mechanical properties is needed. In this study, geometrical limitations in frequency response modeling of flexural nanomechanical resonators are investigated. Deviation of Euler and Timoshenko beam theories from numerical techniques including finite element modeling and Surface Cauchy-Born technique are studied. The results provide a limit beyond which surface energy contribution dominates the mechanical behavior. Using the Surface Cauchy-Born technique as the reference, a maximum error on the order of 50 % is reported for high-aspect ratio resonators.