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NiFe plated biaxial magnetostatic MEMS scanner

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dc.contributor.coauthorYalcinkaya, Arda D.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuprofileFaculty Member
dc.contributor.kuprofileResearcher
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.yokid8579
dc.contributor.yokidN/A
dc.date.accessioned2024-11-09T23:21:15Z
dc.date.issued2007
dc.description.abstractA two axis Microelectromechanical System (MEMS) micromirror actuator is developed for display and imaging applications. The device operates on the principle of generated magnetostatic torque by a flux generating high-frequency electro coil and a magnetic layer deposited on the movable part. The device can supply full optical scan angles of 88 degrees (at 100 mA drive current) and 1.8 degrees for slow and fast scan directions, respectively. Using a mirror size of 1.5 mm, theta(opt)center dot D products of 132 deg-mm and 2.7 deg-mm for slow and fast axis are achieved, respectively. The scanner can be operated in air due to high mechanical quality factors of the order of 3000.
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.description.sponsorshipKo University
dc.description.sponsorshipMicrovision Inc.(USA)
dc.description.sponsorshipTUBITAK [MISAG-280-2004]
dc.description.sponsorshipBogazici University, Scientific Research Commission [BAP-07A202] The research is conducted at Ko University. The authors acknowledge Microvision Inc. (USA) for the prototypes and TUBITAK (project MISAG- 280-2004) for partial funding of this research. A. D. Yalcinkaya thanks Bogazici University, Scientific Research Commission (Project BAP-07A202) for a travel grant.
dc.identifier.doiN/A
dc.identifier.isbn978-1-4244-0841-2
dc.identifier.scopus2-s2.0-50049089031
dc.identifier.urihttps://hdl.handle.net/20.500.14288/10861
dc.identifier.wos249603700376
dc.keywordsMOEMS
dc.keywordsMicro-scanner
dc.keywordsElectromagnetic actuation
dc.languageEnglish
dc.publisherIEEE
dc.sourceTransducers '07 & Eurosensors Xxi, Digest Of Technical Papers, Vols 1 And 2
dc.subjectElectrical electronics engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectPhysical instruments
dc.titleNiFe plated biaxial magnetostatic MEMS scanner
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-2031-7967
local.contributor.authorid0000-0003-3578-0206
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorHolmstrom, Sven
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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