Publication: Biaxial MEMS raster scanner with linear ramp drive
Program
KU-Authors
KU Authors
Co-Authors
Sprague, Randall
Advisor
Publication Date
Language
English
Journal Title
Journal ISSN
Volume Title
Abstract
A biaxial MEMS raster scanner is developed for laser scanning displays. We discuss microfabrication, packaging, and design aspects, and how to minimize power consumption and linearity error by optimizing the vertical scanner resonant frequency and drive waveform.
Source:
2003 IEEE/Leos international Conference on Optical Mems
Publisher:
IEEE
Keywords:
Subject
Optics