Publication: Biaxial MEMS raster scanner with linear ramp drive
Program
KU-Authors
KU Authors
Co-Authors
Sprague, Randall
Publication Date
Language
Embargo Status
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
A biaxial MEMS raster scanner is developed for laser scanning displays. We discuss microfabrication, packaging, and design aspects, and how to minimize power consumption and linearity error by optimizing the vertical scanner resonant frequency and drive waveform.
Source
Publisher
IEEE
Subject
Optics
Citation
Has Part
Source
2003 IEEE/Leos international Conference on Optical Mems
Book Series Title
Edition
DOI
10.1109/OMEMS.2003.1233516