Publication: Biaxial MEMS raster scanner with linear ramp drive
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Sprague, Randall
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N/A
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Abstract
A biaxial MEMS raster scanner is developed for laser scanning displays. We discuss microfabrication, packaging, and design aspects, and how to minimize power consumption and linearity error by optimizing the vertical scanner resonant frequency and drive waveform.
Source
Publisher
Institute of Electrical and Electronics Engineers
Subject
Optics
Citation
Has Part
Source
2003 IEEE/Leos international Conference on Optical Mems
Book Series Title
Edition
DOI
10.1109/OMEMS.2003.1233516
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