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Biaxial MEMS raster scanner with linear ramp drive

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dc.contributor.coauthorSprague, Randall
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuprofileFaculty Member
dc.contributor.otherDepartment of Electrical and Electronics Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.yokid8579
dc.date.accessioned2024-11-09T22:57:30Z
dc.date.issued2003
dc.description.abstractA biaxial MEMS raster scanner is developed for laser scanning displays. We discuss microfabrication, packaging, and design aspects, and how to minimize power consumption and linearity error by optimizing the vertical scanner resonant frequency and drive waveform.
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.identifier.doi10.1109/OMEMS.2003.1233516
dc.identifier.isbn0-7803-7830-X
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-65549146418
dc.identifier.urihttp://dx.doi.org/10.1109/OMEMS.2003.1233516
dc.identifier.urihttps://hdl.handle.net/20.500.14288/7563
dc.identifier.wos185581900078
dc.keywordsCoils
dc.keywordsCopper
dc.keywordsDisplays
dc.keywordsEnergy consumption
dc.keywordsGlass
dc.keywordsMagnets
dc.keywordsMicromechanical devices
dc.keywordsMirrors
dc.keywordsPackaging
dc.keywordsResonant frequency
dc.languageEnglish
dc.publisherIEEE
dc.source2003 IEEE/Leos international Conference on Optical Mems
dc.subjectOptics
dc.titleBiaxial MEMS raster scanner with linear ramp drive
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-2031-7967
local.contributor.kuauthorÜrey, Hakan
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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