Publication:
Biaxial MEMS raster scanner with linear ramp drive

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dc.conference.dateAUG 18-21, 2003
dc.conference.locationWaikoloa, Hawaii, USA
dc.conference.organizerIEEE/LEOS International Conference on Optical MEMS
dc.contributor.coauthorSprague, Randall
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.facultymemberYes
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T22:57:30Z
dc.date.issued2003
dc.description.abstractA biaxial MEMS raster scanner is developed for laser scanning displays. We discuss microfabrication, packaging, and design aspects, and how to minimize power consumption and linearity error by optimizing the vertical scanner resonant frequency and drive waveform.
dc.description.fulltextYes
dc.description.harvestedfromManual
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessGreen OA
dc.description.peerreviewstatusPeer-Reviewed
dc.description.publisherscopeInternational
dc.description.readpublishN/A
dc.description.sponsoredbyTubitakEuN/A
dc.description.studentonlypublicationNo
dc.description.studentpublicationNo
dc.description.versionPost-print
dc.identifier.doi10.1109/OMEMS.2003.1233516
dc.identifier.embargoN/A
dc.identifier.isbn078037830X
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-65549146418
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2003.1233516
dc.identifier.urihttps://hdl.handle.net/20.500.14288/7563
dc.identifier.wos000185581900078
dc.keywordsCoils
dc.keywordsCopper
dc.keywordsDisplays
dc.keywordsEnergy consumption
dc.keywordsGlass
dc.keywordsMagnets
dc.keywordsMicromechanical devices
dc.keywordsMirrors
dc.keywordsPackaging
dc.keywordsResonant frequency
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers
dc.relation.affiliationKoç University
dc.relation.collectionKoç University Institutional Repository
dc.relation.ispartof2003 IEEE/Leos international Conference on Optical Mems
dc.relation.openaccessYes
dc.rightsOther
dc.subjectOptics
dc.titleBiaxial MEMS raster scanner with linear ramp drive
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorÜrey, Hakan
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
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