Publication: Cantilever array oscillators with nonlinear optical readout
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Yaralıoğlu, Gökşen G.
Leblebici, Yusuf
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MEMS array oscillators typically require a separate detector and feedback loop for each oscillator. We show that grating-based-optical-readout induces nonlinearity, which enables simultaneous operation of an array-of-oscillators using only one detector and single electronic feedback-loop.
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Institute of Electrical and Electronics Engineers
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International Conference on Optical MEMS and Nanophotonics
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