Publication: MEMS bimaterial IR sensor array with AC-coupled optical readout
Loading...
Program
KU-Authors
Organization Authors
Co-Authors
Civitci, Fehmi
Ferhanoglu, Onur
Torun, Hamdi
Date
Language
Embargo Status
N/A
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.
Source
Publisher
IEEE
Citation
item.page.haspartof
Source
International Conference on Optical MEMS and Nanophotonics
item.page.ispartofseries
item.page.edition
DOI
10.1109/OMN.2015.7288834
item.page.datauri
item.page.link
Rights
N/A
Copyrights Note
Rights and licensing
N/A