Publication:
MEMS bimaterial IR sensor array with AC-coupled optical readout

Simple item page
dc.contributor.coauthorCivitci, Fehmi
dc.contributor.coauthorFerhanoglu, Onur
dc.contributor.coauthorTorun, Hamdi
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorAdiyan, Ulaş
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:06:04Z
dc.date.issued2015
dc.description.abstractThis paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.
dc.description.indexedbyScopus
dc.description.indexedbyWOS
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.volume02-05-August-2015
dc.identifier.doi10.1109/OMN.2015.7288834
dc.identifier.isbn9781-4673-6834-6
dc.identifier.issn2160-5033
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-84958568476
dc.identifier.urihttps://doi.org/10.1109/OMN.2015.7288834
dc.identifier.urihttps://hdl.handle.net/20.500.14288/8913
dc.keywordsAC coupling
dc.keywordsIR Detection
dc.keywordsOptical Readout
dc.keywordsThermo-Mechanical MEMS MOEMS
dc.keywordsNanophotonics
dc.keywordsAc coupling
dc.keywordsHigh dynamic range
dc.keywordsIR sensor array
dc.keywordsMEMS thermal sensors
dc.keywordsOptical readout
dc.keywordsRead sensor arrays
dc.keywordsSmart pixel cameras
dc.keywordsThermo-mechanical
dc.keywordsPixels
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartofInternational Conference on Optical MEMS and Nanophotonics
dc.subjectElectrical electronics engineering
dc.titleMEMS bimaterial IR sensor array with AC-coupled optical readout
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorAdiyan, Ulaş
local.publication.orgunit1College of Engineering
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication3fc31c89-e803-4eb1-af6b-6258bc42c3d8
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication434c9663-2b11-4e66-9399-c863e2ebae43
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

Files

Collections

Publications without Fulltext