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Optical position feedback and phase control of resonant 1D and 2D MOEMS-scanners

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dc.contributor.coauthorTortschanoff, A.
dc.contributor.coauthorFrank A.
dc.contributor.coauthorWildenhain, M.
dc.contributor.coauthorSandner, T.
dc.contributor.coauthorSchenk H.
dc.contributor.coauthorKenda, A.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorTetikol, Hüseyin Serhat
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T11:35:33Z
dc.date.issued2011
dc.description.abstractResonantly driven oscillating MOEMS mirrors have many applications in the fields of optics, telecommunication and spectroscopy. Assuring stable resonant oscillation with well controlled amplitude under varying environmental conditions is a complex task, which can impede or retard incorporation of such MOEMS mirrors in large systems. For this we have developed compact modules comprising optical position sensing and driver electronics with closed loop control, which can ensure stable resonant operation of 1D and 2D micro-mirrors. In this contribution we present in much detail the position encoding and feedback scheme, and show very first experimental results with the novel 2D device.
dc.description.fulltextYES
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipAustrian COMET-Competence Centres for Excellent Technologies Programme
dc.description.versionPublisher version
dc.formatpdf
dc.identifier.doi10.1117/12.873261
dc.identifier.embargoNO
dc.identifier.filenameinventorynoIR01011
dc.identifier.isbn9780819484673
dc.identifier.issn0277-786X
dc.identifier.linkhttps://doi.org/10.1117/12.873261
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-79953649514
dc.identifier.urihttps://hdl.handle.net/20.500.14288/40
dc.identifier.wos293449300026
dc.keywordsClosed loop
dc.keywordsElectrostatic driving
dc.keywordsMOEMS
dc.keywordsOptical feedback
dc.keywordsPosition sensing
dc.keywordsScanner mirror
dc.languageEnglish
dc.publisherSociety of Photo-optical Instrumentation Engineers (SPIE)
dc.relation.urihttp://cdm21054.contentdm.oclc.org/cdm/ref/collection/IR/id/1001
dc.sourceProceedings of SPIE - The International Society for Optical Engineering
dc.subjectElectrical and electronic engineering
dc.titleOptical position feedback and phase control of resonant 1D and 2D MOEMS-scanners
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.kuauthorTetikol, Hüseyin Serhat
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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